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神野 伊策大学院工学研究科 機械工学専攻教授
研究活動情報
■ 受賞- 2019年10月 経済産業省, 国際標準化貢献者表彰(産業技術環境局長表彰)
- 2019年03月 日本機械学会 情報知能精密機器部門, 日本機械学会 情報知能精密機器部門 功績賞, 機械工学国内学会・会議・シンポジウム等の賞
- 2019年 International Electrotechinical Commission (IEC), 1906 Award
- 2018年 電気学会センサ・マイクロマシン部門, 優秀ポスター発表賞, 第35回「センサ・マイクロマシンと応用システムシンポジウム」発表題目:機械的ストレス下における植物の根系発達過程の解析手法国内学会・会議・シンポジウム等の賞
- 2017年 日本機械学会, 日本機械学会フェロー, 日本機械学会フェロー国際学会・会議・シンポジウム等の賞
- 2006年 日本AEM学会, 日本AEM学会 論文賞, 圧電アクチュエータを用いた進行波型バルブレスマイクロポンプの開発論文賞, 日本国国内外の国際的学術賞
- 2003年10月 Microsystem Technologies, Microsystem Technologies: Best Poster Award, Low-Voltage actuation of RF-MEMS switch using Piezoelectric PZT thin filmsBest Poster Award, ドイツ連邦共和国国際学会・会議・シンポジウム等の賞
- 2025年05月, Ceramics International研究論文(学術雑誌)
- 2025年02月, Journal of Ocean Engineering and Technology研究論文(学術雑誌)
- Elsevier BV, 2024年06月, Journal of the European Ceramic Society, 44(6) (6), 3887 - 3894研究論文(学術雑誌)
- Abstract Lead zirconate titanate (Pb (Zrx, Ti1−x)O3: PZT) is a well-known ferroelectric compound, in which long-range polar order is usually developed. In the present study, it was clarified by distortion-corrected atomic-scale scanning transmission electron microscopy imaging that long-range polar order is disrupted in PZT by utilizing composition-modulated superlattice. Shape of unit cell was unusual both in the Pb(Zr0.65Ti0.35)O3 (PZT65) and Pb(Zr0.30Ti0.70)O3 (PZT30) layers, which was due to mutual in-plane lattice constraint. By taking account of this, first-principles calculations clarified that multiple directions can be energetically favorable for lead-ion displacement, which explains a reason why long-range polar order was disrupted.Springer Science and Business Media LLC, 2024年05月, Journal of Materials Science, 59(19) (19), 8134 - 8146研究論文(学術雑誌)
- 2024年, Sensors and Actuators A: Physical研究論文(学術雑誌)
- 2024年, Sensors and Actuators A: Physical研究論文(学術雑誌)
- Abstract In this study, we introduced Ce and Mn as new substitution elements to develop ferroelectricity in wurtzite-type ZnO thin films on Pt/Ti/SiO2/Si. By substituting (Ce,Mn) for Zn, we observed a decrease in the c/a ratio, which reached its minimum value of 1.582. The relative permittivity increased from 12 to 20 with increasing (Ce,Mn) concentration (2%–15%), while the dielectric loss remained low at about 0.01. The Zn(Ce,Mn)O thin films exhibited clear ferroelectric behavior with a remanent polarization of more than 80 μC cm−2 and a coercive field of about 2.5 MV cm−1.IOP Publishing, 2023年12月, Japanese Journal of Applied Physics, 63(1) (1), 010902 - 010902研究論文(学術雑誌)
- Abstract In this study, Piezoelectric energy harvesters (PEHs) are fabricated based on epitaxial Pb(Zr,Ti)O3 (PZT) thin films deposited by an RF magnetron sputtering with varied Zr/[Zr+Ti] ratio. For a compatibility with micro‐electromechanical systems, the epitaxial PZT thin films are deposited on Si substrates (PZT/Si). The morphotropic phase boundary (MPB) are formed in the compositional range of 0.44 ≤ Zr/[Zr+Ti] ≤ 0.51 of the epitaxial PZT/Si, which is far broader than that of the bulk PZT. Meanwhile, effective transverse piezoelectric coefficient (|e31,f|) values are evaluated by the direct and converse piezoelectric effects using the unimorph cantilever method. Among the compositions, the rhombohedral‐dominant MPB (MPB‐R) of Zr/[Zr+Ti] = 0.51 exhibits a direct |e31,f| of 10.1 C m−2 and a relative permittivity (εr) of 285, leading to the maximum figure of merit of 40 GPa in this study. On the other hand, the maximum converse |e31,f| of 14.0 C m−2 is measured from the tetragonal‐dominant MPB (MPB‐T) of Zr/[Zr+Ti] = 0.44. At a resonance frequency, the MPB‐T presents a high output power density of 301.5 µW−1/(cm2 g2) under an acceleration of 3 m−1 s−2, which is very promising for the high‐performance PEH applications.Wiley, 2023年10月, Advanced Materials Interfaces, 11(2) (2)研究論文(学術雑誌)
- In this study, we fabricated limiting current‐type oxygen microsensors capable of sensing a wide range of oxygen concentrations. The oxygen microsensors consist of yttria‐stabilized zirconia thin films on spiral Ta2O5 diffusion layers and high‐temperature micro‐hotplates. At temperatures above 575 °C, we observed a clear limiting current that increased proportionally with oxygen concentration between 0.4% and 94%. This wide‐range linearity is attributed to the Knudsen diffusion of the oxygen gas passing through the small gap in the spiral Ta2O5 diffusion layer. © 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.Wiley, 2023年10月, IEEJ Transactions on Electrical and Electronic Engineering, 19(5) (5), 796 - 799研究論文(学術雑誌)
- Springer Science and Business Media LLC, 2023年10月, Bulletin of Materials Science, 46(4) (4)研究論文(学術雑誌)
- Abstract In this study, a physical reservoir computing system, a hardware-implemented neural network, was demonstrated using a piezoelectric MEMS resonator. The transient response of the resonator was used to incorporate short-term memory characteristics into the system, eliminating commonly used time-delayed feedback. In addition, the short-term memory characteristics were improved by introducing a delayed signal using a capacitance-resistor series circuit. A Pb(Zr,Ti)O3-based piezoelectric MEMS resonator with a resonance frequency of 193.2 Hz was employed as an actual node, and computational performance was evaluated using a virtual node method. Benchmark tests using random binary data indicated that the system exhibited short-term memory characteristics for two previous data and nonlinearity. To obtain this level of performance, the data bit period must be longer than the time constant of the transient response of the resonator. These outcomes suggest the feasibility of MEMS sensors with machine-learning capability.IOP Publishing, 2023年08月, Japanese Journal of Applied Physics, 62(SM) (SM), SM1013 - SM1013研究論文(学術雑誌)
- Abstract Lead-free epitaxial (K0.47Na0.53)NbO3 (KNN) thin films were fabricated on (001)SrRuO3/Pt/ZrO2/Si substrates by RF magnetron sputtering at 650 °C and were post-annealed at the same 650 °C by a rapid thermal annealing (RTA) process. The crystal structure of epitaxial KNN thin films were changed by RTA, i.e. the lattice parameter c in the out-of-plane direction decreased instead of an increase of the parameter a in the in-plane direction. The displacement–electric field curve of the RTA-annealed KNN thin films was symmetrical and the shift of the polarization reversal field was smaller than in the KNN thin films annealed by a conventional furnace. This means that RTA is effective in compensating for oxygen vacancies as well as suppressing the generation of A-site vacancies at the interface between the thin film and the substrate. The converse piezoelectric coefficient ∣e31,f∣ of the epitaxial KNN/Si unimorph cantilever was found to improve by up to 7.7 C m−2 due to the decrease in defect density resulting from RTA.IOP Publishing, 2023年07月, Japanese Journal of Applied Physics, 62(SM) (SM), SM1010 - SM1010研究論文(学術雑誌)
- Springer Science and Business Media LLC, 2023年06月, Microsystem Technologies, 29(8) (8), 1181 - 1188研究論文(学術雑誌)
- In the quaternary system PbTiO3-PbZrO3-SrTiO3-SrZrO3, compositions that lie close to the antiferroelectric tetragonal and ferroelectric rhombohedral (AFET-FER) phase boundary have potential applications in micro-actuators. However, in thin films, this phase boundary is reported to shift significantly to the zirconium-rich region. Hence, it is necessary to seek alternative approaches to stabilize the tetragonal AFE phase in such compositions. Therefore, this study explores the effect of B-site Mn3+-doping on their structure. Dielectric, ferroelectric, and piezoelectric characteristics of such thin films have been compared with those with increasing Zr/Ti ratios to understand the efficacy of this approach. Transverse piezoelectric coefficient, e31,f, and bipolar strain are found to be higher in Mn3+-doped thin films. Furthermore, large strains and e31,f in thin films have been correlated with structural modifications revealed by systematic Raman spectroscopic investigations.AIP Publishing, 2023年04月, Journal of Applied Physics, 133(16) (16)研究論文(学術雑誌)
- Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm2 and −10 C/m2, respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.MDPI AG, 2023年04月, Materials, 16(8) (8), 3185 - 3185研究論文(学術雑誌)
- 2023年03月, Applied Physics Letters, 122(12) (12), 122902-1 - 122902-6, 英語[査読有り]研究論文(学術雑誌)
- 2023年02月, APPLIED PHYSICS LETTERS, 122(9) (9), 英語
- 2023年01月, THIN SOLID FILMS, 764, 英語研究論文(学術雑誌)
- 2022年11月, JAPANESE JOURNAL OF APPLIED PHYSICS, 61(SN) (SN), 英語研究論文(学術雑誌)
- 2022年11月, Japanese Journal of Applied Physics, 61(SN) (SN), 英語[査読有り]研究論文(学術雑誌)
- 2022年10月, Applied Physics Letters, 121(17) (17), 英語研究論文(学術雑誌)
- 2022年10月, Applied Physics Letters, 121(16) (16), 161901 - 161901, 英語[査読有り]研究論文(学術雑誌)
- 2022年10月, INTEGRATED FERROELECTRICS, 230(1) (1), 163 - 170, 英語研究論文(学術雑誌)
- 2022年10月, APPLIED PHYSICS LETTERS, 121(18) (18), 英語研究論文(学術雑誌)
- 2022年07月, JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 42(8) (8), 3454 - 3462, 英語研究論文(学術雑誌)
- 2022年02月, ACS APPLIED ENERGY MATERIALS, 5(2) (2), 2606 - 2612, 英語研究論文(学術雑誌)
- 2022年, 2022 IEEE SENSORS, 英語研究論文(国際会議プロシーディングス)
- AIP Publishing, 2021年08月, Journal of Applied Physics, 130(7) (7), 074101 - 074101[査読有り]研究論文(学術雑誌)
- Elsevier BV, 2021年08月, Sensors and Actuators A: Physical, 327, 112786 - 112786研究論文(学術雑誌)
- Elsevier BV, 2021年05月, Sensors and Actuators A: Physical, 322, 112617 - 112617研究論文(学術雑誌)
- Institute of Electrical Engineers of Japan (IEE Japan), 2021年05月, IEEJ Transactions on Sensors and Micromachines, 141(5) (5), 141 - 146研究論文(学術雑誌)
- In this study, we designed, fabricated and evaluated a piezoelectric thin-film loudspeaker. To enhance the acoustic output in the low frequency range, the device design was optimized by finite element analysis. The prototype speaker was fabricated using the piezoelectric PZT thin film deposited on a stainless steel substrate using RF magnetron sputtering. The vibration displacement and output sound pressure of the completed device were measured as a function of frequency. The measured SPL increased in proportion to the frequency below the resonance. Above the resonance frequency, the SPL was constant independent of frequency. It achieved a sound pressure level of 65 dB at the resonance frequency of 726 Hz. SPL was calculated from the displacement and we confirmed that the calculated results of the frequency response of SPL were in good agreement with the measurement results.一般社団法人 日本機械学会, 2021年, IIP情報・知能・精密機器部門講演会講演論文集, 2021, IIP1A3-1, 日本語
- Elsevier BV, 2021年01月, Sensors and Actuators B: Chemical, 327, 128932 - 128932研究論文(学術雑誌)
- IOP Publishing, 2020年11月, Japanese Journal of Applied Physics, 59(SP) (SP), SPPD09 - SPPD09研究論文(学術雑誌)
- IOP Publishing, 2020年11月, Japanese Journal of Applied Physics, 59(SP) (SP), SPPB04 - SPPB04[査読有り]研究論文(学術雑誌)
- 公益社団法人 応用物理学会, 2020年08月, 応用物理学会学術講演会講演予稿集, 2020.2, 878 - 878, 日本語
- American Chemical Society (ACS), 2020年07月, ACS Applied Electronic Materials, 2(7) (7), 2084 - 2089[査読有り]研究論文(学術雑誌)
- Interest in energy harvesters has grown rapidly over the last decade. In this study, we fabricate and evaluate piezoelectric energy harvesters (PEH) fabricated from Pb(ZrTi)O3 (PZT) thin films on stainless steel foils. The PZT thin films were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by RF-magnetron sputtering. Parallel and series connection of eachPEH enabled the output power increase as high as turning on a LED.一般社団法人 日本機械学会, 2020年, IIP情報・知能・精密機器部門講演会講演論文集, 2020, 2A06, 日本語
- 2020年, Thin Solid Films, 697, 137840, 英語[査読有り]研究論文(学術雑誌)
- Institute of Physics Publishing, 2019年12月, Journal of Physics: Conference Series, 1407(1) (1), 英語研究論文(国際会議プロシーディングス)
- Taylor and Francis Ltd., 2019年09月, Integrated Ferroelectrics, 201(1) (1), 86 - 93, 英語研究論文(学術雑誌)
- 2019年05月, ケミカルエンジニヤリング, 64(5) (5), 335 - 342, 日本語有機強誘電体薄膜を利用した圧電振動発電
- Elsevier, 2019年02月, Nanoscale Ferroelectric-Multiferroic Materials for Energy Harvesting Applications, 161 - 179, 英語論文集(書籍)内論文
- In this study, we fabricated the piezoelectric microelectromechanical systems (MEMS) speakers with Pb(Zr,Ti)O3 (PZT) thin films. In order to improve the performance of piezoelectric speakers, we fabricated the 2 mm square MEMS speaker with a diaphragm structure of PZT/Si and photosensitive polyimide. The optimal structure was investigated by finite element method (FEM) simulation. The 2 μm thick PZT thin films were deposited on SOI wafers by radio frequency (RF) magnetron sputtering, and microfabricated into unimorph diaphragm. We measured the vibration amplitude of the piezoelectric MEMS speakers as a function of frequency. We confirmed that the resonance frequency was 25.6 kHz that is out of audible range. In addition, the speaker could generate large sound pressure level (SPL) of 82 dB at 6 Vpp.一般社団法人 日本機械学会, 2019年, マイクロ・ナノ工学シンポジウム, 2019.10, 19pm5PN312, 日本語
- In this research, we designed, fabricated and evaluated a PZT thin-film piezoelectric MEMS transformer. First, the disk-shaped device with the ring-dot structure was designed using Finite Element Method (FEM) analysis. At this time, since the piezoelectric transformer is driven in resonance, we confirmed resonance frequency and vibration mode of the transformer. Next, a PZT thin film was deposited on a silicon on insulator (SOI) substrate using RF magnetron sputtering method, and then microfabricated into a piezoelectric transformer. Finally, we measured the impedance and transformation properties of the piezoelectric MEMS transformer. The resonance frequency was observed at 4.57 MHz, and the transformation ratio was found to be about 0.3.一般社団法人 日本機械学会, 2019年, マイクロ・ナノ工学シンポジウム, 2019.10, 19pm5PN318, 日本語
- 2019年, Sensors and Actuators A: Physical, 296, 286 - 291, 英語Ultrahigh temperature platinum microheater encapsulated by reduced-TiO2 barrier layer[査読有り]研究論文(学術雑誌)
- 2019年, Scientific Reports, 9, 7309, 英語Crystallographic contributions to piezoelectric properties in PZT thin films[査読有り]研究論文(学術雑誌)
- Institute of Physics Publishing, 2018年07月, Journal of Physics: Conference Series, 1052(1) (1), 英語研究論文(国際会議プロシーディングス)
- 2018年07月, Journal of Physics: Conference Series, 1052
- 2018年07月, Journal of Physics: Conference Series, 1052(1) (1), 1 - 4, 英語, 国際誌, 国際共著していない[査読有り]研究論文(学術雑誌)
- 2018年07月, Journal of Physics: Conference Series, 1052(1) (1), 012094, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2018年07月, Journal of Physics: Conf. Series, 1052, 012112 - 1-4, 英語[査読有り]研究論文(学術雑誌)
- 2018年, Integrated Ferroelectrics, 192, 113 - 120, 英語Transverse piezoelectric properties of {110}-oriented PLZT thin films[査読有り]研究論文(学術雑誌)
- 2018年, Japanese Journal of Applied Physics, 57, 11UD06, 英語Numerical designs of piezoelectric thin-film vibration energy harvesters[査読有り]研究論文(学術雑誌)
- 2018年, Neuroscience Research, [kuid20190610.xls]論文!E2, [kuid20190610.xls]論文!G2, 英語Immediate elimination of injured white matter tissue achieves a rapid axonal growth across the severed spinal cord in adult rats[査読有り]研究論文(学術雑誌)
- 2018年, Japanese Journal of Applied Physics, 57, 040101, 英語Piezoelectric MEMS: Ferroelectric thin films for MEMS applications[査読有り][招待有り]
- 2018年, 日本機械学会誌, 121(12) (12), 22 - 25, 日本語IoT電源としての振動発電技術[査読有り][招待有り]
- 2017年11月, The 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2017), 271 - 274, 英語Development of Piezoelectric Vibration Energy Harvesters for Batteryless Smart Shoes[査読有り]研究論文(国際会議プロシーディングス)
- 2017年10月, The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), 英語ON-CHIP MECHANICAL STRESS TEST ON PLANT ROOT GROWTH[査読有り]研究論文(国際会議プロシーディングス)
- 2017年10月, The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), 英語METHODS FOR PHYSHICAL CHARACTERIZATION OF GROWING PLANT ROOTS[査読有り]研究論文(国際会議プロシーディングス)
- 2017年10月, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(10) (10), 10PF08, 英語[査読有り]研究論文(学術雑誌)
- 2017年07月, APPLIED PHYSICS LETTERS, 111(2) (2), 英語[査読有り]研究論文(学術雑誌)
- 2017年07月, SENSORS AND ACTUATORS A-PHYSICAL, 261, 295 - 301, 英語[査読有り]研究論文(学術雑誌)
- 公益社団法人 応用物理学会, 2017年03月, 応用物理学会学術講演会講演予稿集, 2017.1, 1271 - 1271, 日本語
- This paper presents a novel microfluidic device for high throughput ion-channel analysis. To analyze the electrophysiological properties of cells efficiently, we designed the electrically independent microchannels on the microfluidic device. The microfluidic device is composed of a silicon-on-insulator (SOI) layer having the trap holes with 9 or 12 μm diameter, poly-dimethylsiloxane (PDMS) microchannel chips and glass substrate with Pt electrodes. We successfully trapped the multiple cells on one device without damage by applying negative pressure to the microchannels with a syringe pump. Finally, we confirmed that the each trap hole was strongly sealed with the cell by measuring the electrical impedance, which was more than 1 GΩ, namely gigaseal.一般社団法人 日本機械学会, 2017年, マイクロ・ナノ工学シンポジウム, 2017.8, PN-27, 日本語
- In this study, we fabricated the microelectromechanical systems (MEMS) microphones composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin-film bimorphs. To improve the sensitivity of the piezoelectric MEMS microphone, we designed the PZT bimorph cantilevers by using a finite element method (FEM) simulation. The dimensions of the PZT bimorphs are 1000 μm in width and 280 μm in length. The two layers of 1-μm-thick PZT thin films were deposited on Si substrates by radio frequency (RF) magnetron sputtering and formed into the cantilevers by dry etching. To evaluate the frequency responses, we measured the vibration amplitude of the PZT bimorphs oscillated by applying the negative AC voltage. The piezoelectric microphone was demonstrated by detecting the output signal owing to the direct piezoelectric effect when the sound pressure was applied. We confirmed that the output signal of the piezoelectric microphone was proportionally increased by increasing the applied sound pressure.一般社団法人 日本機械学会, 2017年, マイクロ・ナノ工学シンポジウム, 2017.8, PN-97, 日本語
- Recently, development of insect scale robots has been attracting attention. These robots are expected to be used for inspection or sensing in narrow and danger places where human cannot enter. In this study, we fabricated and evaluated piezoelectric thin film actuators intended for flapping wing insect scale robot. We firstly report a FEM analysis results of piezoelectric PZT thin-film actuators. To verify this analysis results, we deposited PZT thin films on micro-fabricated stainless steel substrates and evaluated their crystal structure, electrical properties, and piezoelectric properties of PZT thin films. X-ray diffraction measurements reveal that the PZT thin films have a polycrystalline perovskite structure. The relative dielectric constant of the PZT thin films was 240. FEM analysis results are in good agreement with the resonant frequency. The angular displacement are less than 1° in all measurement points driven by resonant frequency (5Vpp, 2.095 and 2.257 kHz).一般社団法人 日本機械学会, 2017年, 年次大会, 2017, G1600102, 日本語
- We fabricated a new diaphragm micropump composed of the piezoelectric Pb(Zr,Ti)O3 (PZT) thin films on the stainless-steel (SS) foil substrates to reduce the driving voltage. To miniaturize and simplify the micropump structure, the diaphragm and microchannel with diffusers were monolithically formed on the 30-μm-thick SS substrates by photolithography and wet etching. We directly deposited the 1-μm-thick PZT thin films on the SS diaphragm by dip coating with a sol-gel solution. To evaluate the driving characteristics of the fabricated micropump, the SS diaphragm was actuated by applying AC voltage to the PZT thin films. The displacement of the 9-μm-thick SS diaphragm was 1.7 μm with 10 Vpp-driving voltage at 1 Hz.一般社団法人 日本機械学会, 2017年, マイクロ・ナノ工学シンポジウム, 2017.8, PN-8, 日本語
- Lithium ion batteries are widely used in a variety of portable products because of their high energy density. Recently solid-state lithium ion batteries have been studied to solve the safety issue of liquid electrolyte. In order to realize solid state thin film batteries, we prepared electrode thin films by RF magnetron sputtering on Pt/Ti/Si substrates. In this study, LiCoO2(LCO) cathode thin films were deposited. After annealing at 620°C, clear diffraction of (003) and (101) orientation was detected in XRD measurements. Si anode, Cyclic voltammgram showed oxidation and reduction peaks at 0.6 V, 0.01 V, respectively. We also measured the capacity of the Si thin film by the discharge-charge curves. The discharge-charge capacity of 660 μAh/(cm2・μm) and 609 μAh/(cm2・μm) could be obtained for the Si anode thin films, respectively.一般社団法人 日本機械学会, 2017年, IIP情報・知能・精密機器部門講演会講演論文集, 2017, I - 1, 日本語
- This paper describes piezoelectric vibration energy harvester (PVEH). The PVEH was fabricated from Pb(ZrTi)O3 (PZT) thin films which were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by rf-magnetron sputtering. We measured output power of the PVEH as well as theoretical calculation. The output power showed maximum at the calculated optimal load resistance of 73.2 kΩ, where the output power was 1.0 μW. For the purpose of predicting output power, we tried to derive electromechanical coupling coefficient. Applying an equivalent circuit model of the energy harvester, we succeeded in deriving electromechanical coupling coefficient.一般社団法人 日本機械学会, 2017年, IIP情報・知能・精密機器部門講演会講演論文集, 2017, I - 2, 日本語
- 2017年, Japanese Journal of Applied Physics, 56(4) (4), 04CL04, 英語[査読有り]研究論文(学術雑誌)
- 2017年01月, CERAMICS INTERNATIONAL, 43(1) (1), 1597 - 1601, 英語[査読有り]研究論文(学術雑誌)
- 2017年, MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 653(1) (1), 188 - 193, 英語[査読有り]研究論文(学術雑誌)
- 表面技術協会, 2017年, 表面技術, 68(7) (7), 387 - 391, 日本語圧電薄膜アクチュエータ[査読有り][招待有り]
- 2016年12月, Journal of Alloys and Compounds, 688(PB) (PB), 863 - 867, 英語[査読有り]研究論文(学術雑誌)
- 2016年10月, THIN SOLID FILMS, 616, 444 - 448, 英語[査読有り]研究論文(学術雑誌)
- 2016年10月, Proc. of 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2016), 英語ANALYTICAL METHODS OF ROOT GROWTH BEHAVIOR USING AN ARTIFICIAL SOIL DEVICE[査読有り]研究論文(国際会議プロシーディングス)
- 公益社団法人 応用物理学会, 2016年09月, 応用物理学会学術講演会講演予稿集, 2016.2, 1236 - 1236, 日本語
- 2016年06月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1275 - 1283, 英語[査読有り][招待有り]研究論文(学術雑誌)
- 2016年06月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1429 - 1436, 英語[査読有り]研究論文(学術雑誌)
- 2016年06月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1275 - 1283, 英語[査読有り]研究論文(学術雑誌)
- 2016年06月, Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), 英語FABRICATION OF FORCE SENSOR FOR STUDYING SEED GERMINATION OF PLANTS[査読有り]研究論文(国際会議プロシーディングス)
- 応用物理学会, 2016年03月, 応用物理, 85(3) (3), 207, 日本語圧電MEMSの基礎技術と応用展開[査読有り][招待有り]
- In this study, we fabricated a microelectromechanical systems (MEMS) cylindrical gyroscope integrated with piezoelectric thin-film for sensing/driving elements. The cylindrical gyroscope has several advantages: (1) the sensitivity can be improved due to the high Q-factor. (2) we can eliminate an initial output signal from the sensing electrodes. We characterized the resonant characteristics of the cylindrical gyroscope in wine-glass mode and the Q-factor was 723 at 36.13 kHz under atmospheric pressure. In addition, we experimentally confirmed that the mechanical vibration of the gyroscope can be measured by detecting the electrical signal due to the piezoelectric effect of Pb(Zr,Ti)O3 (PZT).一般社団法人 日本機械学会, 2016年, 年次大会, 2016, J2230103, 日本語
- 2016年, 16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016), 773, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2016年, INTEGRATED FERROELECTRICS, 176(1) (1), 210 - 219, 英語[査読有り]研究論文(学術雑誌)
- 表面技術協会, 2016年, 表面技術, 67(7) (7), 348 - 352, 日本語振動エネルギーによる環境発電(振動発電)[査読有り][招待有り]
- 2016年, 日本電子材料技術協会会報, 47, 26 - 29, 日本語金属基板上圧電薄膜による振動発電技術[査読有り][招待有り]
- 2015年11月, Proceedings of The 8th Plant Biomechanics International Conference, 英語Development of on-chip physical characterization method for root growth[査読有り]研究論文(国際会議プロシーディングス)
- 2015年10月, JAPANESE JOURNAL OF APPLIED PHYSICS, 54(10) (10), 1 - 10, 英語[査読有り]研究論文(学術雑誌)
- 2015年10月, Proceedings of 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2015), 英語METHODS OF PLANT ROOT CHARACTERIZATION UNDER VARIABLE ENVIRONMENTAL CONDITIONS TOWARD IMPROVING CROP PRODUCTIVITY[査読有り]研究論文(国際会議プロシーディングス)
- 2015年08月, THIN SOLID FILMS, 588, 34 - 38, 英語[査読有り]研究論文(学術雑誌)
- 2015年06月, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2015年06月, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2015年06月, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2015年05月, JOURNAL OF MATERIALS SCIENCE, 50(10) (10), 3631 - 3637, 英語[査読有り]研究論文(学術雑誌)
- 2015年02月, MATERIALS CHEMISTRY AND PHYSICS, 151, 308 - 311, 英語[査読有り]研究論文(学術雑誌)
- 2015年, 15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015), 660, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2015年, Energy Harvesting and Systems, 3, 61, 英語Fabrication of high-efficiency piezoelectric energy harvesters of epitaxial Pb(Zr,Ti)O3 thin films by laser lift-off[査読有り]研究論文(学術雑誌)
- 2015年, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.1, 377 - 380, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2015年, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.2, 702 - 705, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2015年, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 973 - 976, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2014年12月, Proc. of The International Conference on Small Science (ICSS 2014), 英語MEMS Applications in Agriculture[査読有り][招待有り]研究論文(国際会議プロシーディングス)
- 2014年10月, Proc. of the 4th International Workshop on Piezoelectric MEMS, 英語Power generation reliability of PZT thin films on stainless-steel cantilevers[査読有り]研究論文(国際会議プロシーディングス)
- 2014年10月, Proc. of 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2014), 276 - 278, 英語HIGH-THROUGHPUT CHEMOTAXIS ASSAY OF PLANT-PARASITIC NEMATODE TOWARD GREEN AGRICULTURE[査読有り]研究論文(国際会議プロシーディングス)
- 2014年10月, Proc. of the 4th International Workshop on Piezoelectric MEMS, 英語Compositional dependence of (1-x)Ba(Zr0.2Ti0.8)O3-x(Ba0.7Ca0.3)TiO3 piezoelectric thin films prepared by combinatorial sputtering[査読有り]研究論文(国際会議プロシーディングス)
- We evaluated the compositional dependence of Pb(MgInstitute of Physics, 2014年09月, Jpn. J. Appl. Phys., 53(9) (9), 09PA06, 英語
1/3 ,Nb2/3 )O3 –PbTiO3 (PMN–PT) polycrystalline thin films by combinatorial sputtering. We prepared compositional gradient (1 − x)PMN–xPT polycrystalline thin films with preferential orientation along the 〈001〉 direction in the composition range of x = 0–0.62. We determined that the morphotropic phase boundary (MPB) composition of PMN–PT polycrystalline thin film existed at around x = 0.35, from the X-ray diffraction (XRD) measurements. The maximum value of relative dielectric constants (εr = 1498) was obtained at approximately x = 0.23. On the other hand, the piezoelectric coefficients (|e31,f | = 14.1 C/m2) peaked at the determined MPB composition of x = 0.35. From the results of the compositional dependence of dielectric and piezoelectric characteristics, the FOM ([Formula: see text]) of the PMN–PT (x = 0.35) thin film reached 21 GPa, which is much higher than that of the other polycrystalline piezoelectric thin films. These results suggest that PMN–PT (x = 0.35) thin film is a promising material for high-efficiency piezoelectric MEMS energy harvesters. - 2014年09月, Japanese Journal of Applied Physics, 53(9) (9), 1 - 9, 英語[査読有り]研究論文(学術雑誌)
- 2014年08月, Proc. of the 10th Japan-Korea Conference on Ferroelectrics, 英語Measurement of Transverse Piezoelectric Coefficient e31,f of Pb(Zr,Ti)O3 Thin Film with Stripe Electrodes[査読有り]研究論文(国際会議プロシーディングス)
- 2014年08月, Proc. of the 10th Japan-Korea Conference on Ferroelectrics, 英語Fabrication of Multi-layered PZT Piezoelectric Thin Film[査読有り]研究論文(国際会議プロシーディングス)
- 公益社団法人 応用物理学会, 2014年03月, 応用物理学会学術講演会講演予稿集, 2014.1, 141 - 141, 日本語
- システム制御情報学会, 2014年, システム・制御・情報 = Systems, control and information : システム制御情報学会誌, 58(11) (11), 443 - 448, 日本語振動発電によるMEMSエナジーハーベスト技術
- 2014年, 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 557(1) (1), 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2014年, 2014 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2014年, 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 557(1) (1), 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2013年09月, Japanese Journal of Applied Physics, 52(9) (9), 1 - 9, 英語[査読有り]研究論文(学術雑誌)
- 日本セラミックス協会, 2013年07月, セラミックス, 48(7) (7), 542 - 545, 日本語圧電薄膜を用いた振動発電素子技術[招待有り]
- カンチレバーを機械要素とする圧電薄膜エナジーハーベスターの振動発電特性は,圧電特性だけでなく,共振周波数や振動Q値など素子の振動特性にも依存する.そこで,本研究ではエナジーハーベスターの発電性能と,素子形状及び基板材料との関係を明らかにすることを目的として,異なる金属材料を基板とするPZT薄膜エナジーハーベスターを作製し,振動発電評価を行った.公益社団法人 精密工学会, 2013年, 精密工学会学術講演会講演論文集, 2013, 505 - 506, 日本語
- 2013年01月, ACS NANO, 7(1) (1), 447 - 455, 英語[査読有り]研究論文(学術雑誌)
- 2013年01月, JOURNAL OF APPLIED PHYSICS, 113(4) (4), 英語[査読有り]研究論文(学術雑誌)
- 2013年, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1051 - 1054, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2013年, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 474 - 477, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2013年, 2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), 英語[査読有り]研究論文(国際会議プロシーディングス)
- IEEE Computer Society, 2013年, 2013 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2012年12月, MICRO & NANO LETTERS, 7(12) (12), 1223 - 1225, 英語[査読有り]研究論文(学術雑誌)
- 2012年11月, MRS BULLETIN, 37(11) (11), 1039 - 1050, 英語[査読有り][招待有り]研究論文(学術雑誌)
- 2012年10月, MICROELECTRONIC ENGINEERING, 98, 58 - 63, 英語[査読有り]研究論文(学術雑誌)
- 2012年09月, JAPANESE JOURNAL OF APPLIED PHYSICS, 51(9) (9), 1 - 9, 英語[査読有り]研究論文(学術雑誌)
- 2012年08月, SENSORS AND ACTUATORS B-CHEMICAL, 171, 1321 - 1326, 英語[査読有り]研究論文(学術雑誌)
- 2012年08月, BIOMEDICAL MICRODEVICES, 14(4) (4), 791 - 797, 英語[査読有り]研究論文(学術雑誌)
- 2012年07月, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 13(7) (7), 1107 - 1112, 英語[査読有り]研究論文(学術雑誌)
- 2012年07月, JAPANESE JOURNAL OF APPLIED PHYSICS, 51(7) (7), 1 - 76202, 英語[査読有り]研究論文(学術雑誌)
- 2012年06月, SENSORS AND ACTUATORS A-PHYSICAL, 179, 132 - 136, 英語[査読有り]研究論文(学術雑誌)
- 2012年06月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(6) (6), 765 - 771, 英語[査読有り]研究論文(学術雑誌)
- 2012年06月, THIN SOLID FILMS, 520(17) (17), 5797 - 5800, 英語[査読有り]研究論文(学術雑誌)
- 2012年04月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(2) (2), 451 - 457, 英語[査読有り]研究論文(学術雑誌)
- 2012年04月, Advanced Materials Letters, 3(2) (2), 102 - 106, 英語[査読有り]研究論文(学術雑誌)
- 2012年, PROCEEDINGS OF THE 2012 FIFTH INTERNATIONAL CONFERENCE ON EMERGING TRENDS IN ENGINEERING AND TECHNOLOGY (ICETET 2012), 44 - 47, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2012年, セラミックス, 47, 日本語スパッタリング法によるKNN 系非鉛強誘電体薄膜の作製とその加工技術[査読有り][招待有り]研究論文(学術雑誌)
- 2012年, International Journal of Precision Engineering and Manufacturing, 13(7) (7), 1107 - 1112, 英語[査読有り]研究論文(学術雑誌)
- 2012年01月, IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 59(1) (1), 6 - 13, 英語[査読有り]研究論文(学術雑誌)
- 2011年11月, MICROFLUIDICS AND NANOFLUIDICS, 11(5) (5), 519 - 527, 英語[査読有り]研究論文(学術雑誌)
- 2011年11月, SENSORS AND ACTUATORS A-PHYSICAL, 171(2) (2), 223 - 227, 英語[査読有り]研究論文(学術雑誌)
- 2011年10月, SENSORS AND ACTUATORS A-PHYSICAL, 169(2) (2), 274 - 281, 英語[査読有り]研究論文(学術雑誌)
- 2011年09月, JAPANESE JOURNAL OF APPLIED PHYSICS, 50(9) (9), 1 - 9, 英語[査読有り]研究論文(学術雑誌)
- 養賢堂, 2011年06月, 機械の研究, 63(6) (6), 459 - 466, 日本語機能性薄膜のマイクロデバイス応用--圧電薄膜を用いたMEMSデバイス
- 2011年06月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 17(5-7) (5-7), 931 - 935, 英語[査読有り]研究論文(学術雑誌)
- 2010年09月, SENSORS AND ACTUATORS A-PHYSICAL, 163(1) (1), 428 - 432, 英語[査読有り]研究論文(学術雑誌)
- This paper presents a novel technique of positioning heterotypic cells using electroosmotic flow (EOF). Positioning heterotypic cells is a key technique toward the development of single cell analysis. Several techniques for positioning cells have been developed, such as using dielectrophoresis and physical trapping in microchannel. These techniques, however, require additional methods for subsequent biological experiments after arraying cells. In this study, we demonstrated the positioning of two kinds of cells at designated pocket-like microstructures. In this method, cells were positioned using multi-directional EOF in open-to-air flow chamber which would allow easy handling for further biological experiments. After positioning heterotypic cells, we cultivated them and observed cell-cell interactions via gap junctions by the transfer of a fluorescent dye.一般社団法人日本機械学会, 2010年, 年次大会講演論文集, 2010, 239 - 240, 日本語
- Recently, motor protein such as kinesin or dynein has been used as a nano actuator. Previous works have achieved the control of the movement of microtubules (MT) and the transport of molecular cargo. However, the movement of microtubules was led by minus-end because only kinesin was used as an actuator. In this paper, we patterned motor proteins selectively by surface modification and control the location of microtubules by electrophoresis. Selective patterning of motor proteins and actively control of the MT location enables MTs to move with minus-end and plus-end as leading heads by kinesin and dynein motors.一般社団法人日本機械学会, 2010年, 年次大会講演論文集, 2010, 135 - 136, 日本語
- 多重マスク回転傾斜露光法による3次元複雑マイクロ構造の作製Fabrication method of complex 3D structures becomes more important for improvement of soft-MEMS. Then, we propose a new fabrication method that can fabricate complex 3D micro-structures by the inclined rotated UV lithography with an optional fixed mask. A simulation method of the proposed lithography was developed on the basis of electromagnetic theory to calculate fabricated structures in order to assist design of the main and the optional masks. The validity of the proposed lithography and the simulation method were confirmed by demonstrations of the comparison of complex 3D structures between fabricated structures and simulated ones. The proposed method shows the potential to fabricate novel micro-structures and to improve the performance of micro-devices.日本AEM学会, 2010年, 日本AEM学会誌, 18(4) (4), 377 - 382, 日本語
- 2010年01月, APPLIED PHYSICS LETTERS, 96(3) (3), 31909, 英語[査読有り]研究論文(学術雑誌)
- 2010年, JAPANESE JOURNAL OF APPLIED PHYSICS, 49(9) (9), 1 - 9, 英語[査読有り]研究論文(学術雑誌)
- 2010年, JAPANESE JOURNAL OF APPLIED PHYSICS, 49(9) (9), 1 - 9, 英語[査読有り]研究論文(学術雑誌)
- 2009年09月, APPLIED PHYSICS EXPRESS, 2(9) (9), pp.091402, 英語[査読有り]研究論文(学術雑誌)
- 2009年06月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 18(3) (3), 610 - 615, 英語[査読有り]研究論文(学術雑誌)
- 2009年06月, SENSORS AND ACTUATORS A-PHYSICAL, 152(2) (2), 211 - 218, 英語[査読有り]研究論文(学術雑誌)
- 2009年04月, APPLIED PHYSICS LETTERS, 94(17) (17), 172903, 英語[査読有り]研究論文(学術雑誌)
- 2009年, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1900 - 1903, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2009年, 日本AEM学会誌, Vol.17.(No.2) (No.2), pp.253 - 258, 日本語積層型圧電アクチュエータを用いた進行波型マイクロポンプによる流体輸送制御[査読有り]研究論文(学術雑誌)
- 回転傾斜露光法による複雑マイクロ構造作製とバイオデバイスへの応用Fabrication of complex 3D structures becomes more important for improvement of soft-MEMS. Then, we propose the new fabrication method that can fabricate complex 3D structures with inclined rotated UV lithography on only one process. The simulation of the proposed method was developed to calculate the fabricated structures to assist design of masks. The validity of the method and the simulation were confirmed by demonstration of fabrication of the complex 3D structures and by similarity between fabricated structures and simulated ones. In addition, to indicate the availability of fabricated complex structures, the fabricated structures were applied to the FISH (Fluorescence In Situ Hybridization) process that is the method of observation for chromosomes. In this study, the proposed method showed the potential to fabricate the novel structures and to improve the performance of micro-device.日本AEM学会, 2009年, 日本AEM学会誌, Vol.17.(No.2) (No.2), pp.274 - 278, 日本語[査読有り]研究論文(学術雑誌)
- 2009年, Journal of Physics D: Applied Physics, Vol.141., pp.115507, 英語Effects of fluid dynamic stress on fracturing of cell-aggregated tissue during purification for islets of Langerhans transplantation[査読有り]研究論文(学術雑誌)
- 2008年12月, JAPANESE JOURNAL OF APPLIED PHYSICS, 47(12) (12), 8909 - 8913, 英語[査読有り]研究論文(学術雑誌)
- 2008年11月, SENSORS AND ACTUATORS A-PHYSICAL, 148(1) (1), 134 - 137, 英語[査読有り]研究論文(学術雑誌)
- RF‐MEMSスイッチ用圧電薄膜型マイクロアクチュエータの開発A piezoelectric RF-MEMS switch driven by PZT thin films was investigated for low-voltage actuation. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111) Pt/Ti/Si substrates by RF-sputtering. In the previous paper, the cantilever type actuators composed of PZT thin films and Cr elastic layers have been successively fabricated as unimorph structure, but large initial bending arose due to the residual stress in the PZT and Cr layers. In this paper, we optimized the deposition condition for Cr elastic layer in order to reduce the initial bending. Then, new structures of piezoelectric actuators having cantilever and four edges supported beam types were fabricated, and evaluated for the driving property. The deflection of cantilever and four edges supported beam type actuators applied the voltage of 5V were 2.6μm and 1.3μm, respectively. As a result, it is confirmed that the proposed actuators can be adopted for RF-MEMS switches with low-voltage actuation.日本AEM学会, 2008年06月, 日本AEM学会誌, 16(2) (2), 82 - 87, 日本語[査読有り]
- 2008年06月, JAPANESE JOURNAL OF APPLIED PHYSICS, 47(6) (6), 5226 - 5230, 英語[査読有り]研究論文(学術雑誌)
- 2008年, Proceedings - IEEE Ultrasonics Symposium, 1920 - 1923, 英語[査読有り]研究論文(国際会議プロシーディングス)
- Piezoelectric MEMS deformable mirror resolution is studied for an adaptive optics device. In previous study, we have developed the piezoelectric MEMS deformable mirrors which have 19 actuator away. To improve the resolution of the deformable mirror, we designed hexagonal 61-element actuator array. In order to reduce the dead space for the lead lines between the actuators, they were prepared on the polyimide insulating layer. The displacement of each actuator was measured by using a lasor Doppler vibrometer and we confirmed a relatively large displacement of more than 1pm by applying a voltage of 10Vpp. Furthermore, we measured the relationship input voltage and displacement and fabricated DMs actuated linearly when applied -20〜20Vpp.一般社団法人日本機械学会, 2008年, 年次大会講演論文集, 2008, 17 - 18, 日本語
- In this paper, we propose and study innovative liquid pimping devices for microfluidic systems such as pTAS. In our study, microchaimels with vibrating wall were fabricated on silicon on insulator (SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the microchannel wall. The microchannel can transport liquid by traveling wave induced on channel wall by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. We examined the difference of the characteristics that were the to the effect of the structure of channel wall.一般社団法人日本機械学会, 2008年, 年次大会講演論文集, 2008, 19 - 20, 日本語
- 2008年, 日本AEM学会誌, Vol.16.(No.2) (No.2), pp.82 - 87, 日本語鈴木孝明,田澤慶朗,神野伊策,小寺秀俊[査読有り]研究論文(学術雑誌)
- 2008年01月, APPLIED PHYSICS EXPRESS, 1(1) (1), 1 - 11501, 英語[査読有り]研究論文(学術雑誌)
- 2007年12月, IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 54(12) (12), 2562 - 2566, 英語[査読有り]研究論文(学術雑誌)
- 2007年10月, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 46(10B) (10B), 6960 - 6963, 英語[査読有り]研究論文(学術雑誌)
- 2007年08月, MICROFLUIDICS AND NANOFLUIDICS, 3(4) (4), 427 - 435, 英語[査読有り]研究論文(学術雑誌)
- 2007年05月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 13(8-10) (8-10), 825 - 829, 英語[査読有り]研究論文(学術雑誌)
- 2007年05月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 13(8-10) (8-10), 951 - 958, 英語[査読有り]研究論文(学術雑誌)
- 2007年05月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 13(8-10) (8-10), 1391 - 1396, 英語[査読有り]研究論文(学術雑誌)
- 2007年03月, IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 13(2) (2), 155 - 161, 英語[査読有り]研究論文(学術雑誌)
- 2007年, COMPLEX MEDICAL ENGINEERING, 3 - +, 英語[査読有り]研究論文(国際会議プロシーディングス)
- 2007年, 日本AEM学会誌, Vol.15.(No.2) (No.2), pp.70 - 75, 日本語低電圧駆動型指向性可変ミリ波アンテナのための基礎的研究(誘電体の局所温度場を制御するマイクロヒータ)[査読有り]研究論文(学術雑誌)
- 2007年01月, VACUUM, 81(5) (5), 571 - 578, 英語[査読有り]研究論文(学術雑誌)
- 2006年11月, VACUUM, 81(4) (4), 459 - 465, 英語[査読有り]研究論文(学術雑誌)
- 2006年09月, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 45(9B) (9B), 7258 - 7261, 英語[査読有り]研究論文(学術雑誌)
- 2006年05月, JOURNAL OF MATERIALS RESEARCH, 21(5) (5), 1261 - 1268, 英語[査読有り]研究論文(学術雑誌)
- 2006年04月, SURFACE REVIEW AND LETTERS, 13(2-3) (2-3), 167 - 172, 英語Heteroepitaxial growth of stress free single crystal perovskite thin films[査読有り]研究論文(学術雑誌)
- 2006年03月, APPLIED PHYSICS LETTERS, 88(12) (12), pp.122903, 英語[査読有り]研究論文(学術雑誌)
- 2006年, Advances in Science and Technology, Vol.45., pp.1212 - 1217, 英語Structure and Electromechanical Properties of Quenched PMN-PT Single Crystal Thin Films[査読有り]研究論文(学術雑誌)
- 2006年, LAB ON A CHIP, 6(9) (9), 1147 - 1154, 英語[査読有り]研究論文(学術雑誌)
- 2006年01月, SENSORS AND ACTUATORS A-PHYSICAL, 125(2) (2), 382 - 386, 英語[査読有り]研究論文(学術雑誌)
- 2005年04月, JOURNAL OF APPLIED PHYSICS, 97(7) (7), pp. 074101, 英語[査読有り]研究論文(学術雑誌)
- 2005年03月, INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 42(5-6) (5-6), 1729 - 1741, 英語[査読有り]研究論文(学術雑誌)
- 2005年, MICRO TOTAL ANALYSIS SYSTEMS 2004, VOL 2, (297) (297), 13 - 15, 英語Development of peristaltic soft micropump driven by electrostatic actuator[査読有り]研究論文(国際会議プロシーディングス)
- Vacuum Society of Japan, 2005年, Shinku/Journal of the Vacuum Society of Japan, 48(3) (3), 133 - 135, 日本語[査読有り]研究論文(学術雑誌)
- 2005年, Journal of the Japan Society of Applied Electromagnetics, vol. 13, pp. 310-315, 英語Development of Valveless Micropump Piezoelectrically Driven by Traveling Wave[査読有り]
- 2005年, 日本AEM学会誌, Vol.13.(No.4) (No.4), pp.310 - 315, 日本語圧電アクチュエータを用いた進行波型バルブレスマイクロポンプの開発[査読有り]研究論文(学術雑誌)
- Japan Society of Mechanical Engineers, 2005年, 日本機械学会論文集B, 71(708) (708), 2007 - 2012, 日本語[査読有り]研究論文(学術雑誌)
- 2005年, INTEGRATED FERROELECTRICS, 70, 131 - 140, 英語[査読有り]研究論文(学術雑誌)
- 2005年, FERROELECTRICS, 328, 69 - 77, 英語[査読有り]研究論文(学術雑誌)
- 2005年, FERROELECTRICS, 327, 91 - 95, 英語[査読有り]研究論文(学術雑誌)
- 2004年09月, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 43(9B) (9B), 6627 - 6631, 英語[査読有り]研究論文(学術雑誌)
- 2004年02月, Physical Review B - Condensed Matter and Materials Physics, 69(6) (6), 英語[査読有り]研究論文(学術雑誌)
- 2004年02月, PHYSICAL REVIEW B, 69(6) (6), pp.64103, 英語[査読有り]研究論文(学術雑誌)
- Mixing of samples and reagents in microchannels is a key technology in realizing a μTAS. Turbulence is not practically attainable in micro-scale since Reynolds number is extremely low. Therefore, introducing oscillations or electrical force to disturb liquid flow is necessary to enhance the mixing in microchannels. Some researchers reported mixing method by the use of time pulsating cross-flow into main channel. In those systems, complex actuators are necessary and the efficiency is not so high due to the difficulties in the optimization. In this paper, we present a simple mixing method using an asymmetric pulsating flow.一般社団法人日本機械学会, 2004年, 年次大会講演論文集, 2004, 67 - 68, 日本語
- 2004年, 2004 14th IEEE International Symposium on Applications of Ferroelectrics-ISAF-04, 11 - 16, 英語Structure and ferroelectric properties of sputtered PMNT thin films[査読有り]研究論文(国際会議プロシーディングス)
- 2004年, Produktion von Leiterplatten Und Systemen, Vol.6.(No.3.) (No.3.), pp457 - 459, 英語Low-Voltage Actuation of RF-MEMS Switch Using Piezoelectric PZT Thin-Films[査読有り]研究論文(学術雑誌)
- 2003年10月, SENSORS AND ACTUATORS A-PHYSICAL, 107(1) (1), 68 - 74, 英語[査読有り]研究論文(学術雑誌)
- 2003年04月, JOURNAL OF APPLIED PHYSICS, 93(7) (7), 4091 - 4096, 英語[査読有り]研究論文(学術雑誌)
- 2003年04月, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 42, S1317 - S1321, 英語Anomalous cystalline structure of epitaxial Pb(Zr,Ti)O-3 films grown on (100)Pt/(100)MgO by RF-magnetron sputtering[査読有り]研究論文(学術雑誌)
- 2003年, INTEGRATED FERROELECTRICS, 55, 781 - 793, 英語[査読有り]研究論文(学術雑誌)
- オ-ム社, 2003年, New Diamond, Vol. 19.(No.2) (No.2), pp.29 - 14, 日本語DLC・ダイヤモンド薄膜のMEMSおよびμ-TASへの応用[招待有り]研究論文(学術雑誌)
- 2002年08月, Physical Review B, 66(6) (6), pp. 064102, 英語[査読有り]研究論文(学術雑誌)
- 2002年, Micro Total Analysis Systems 2002, No. 1,, pp. 88 - 90, 英語Development of Micomixer Based on Instability of Interface Between Two Immiscble Liquids(共著)[査読有り]研究論文(学術雑誌)
- 2002年, Micro Total Analysis Systems 2002, No.1,, pp. 148 - 150, 英語Bi-directional Valve-less Micropumu using Piezoelectric Micro-array Actuators(共著)[査読有り]研究論文(学術雑誌)
- 2001年, The Society of Materials Science, B, pp. 193-196, 英語Piezoelectric Properties of Pzt Thin Film[査読有り]
- 2000年, IEEJ Transactions on Sensors and Micromachines, 120(12) (12), 559 - 564, 英語[査読有り]研究論文(学術雑誌)
- 2000年, Trans. IEE of Japan, 120(12) (12), 559 - 564, 英語[査読有り]研究論文(学術雑誌)
- 1999年05月, Journal of Applied Phisics, 85(9) (9), 6711 - 6716, 英語[査読有り]研究論文(学術雑誌)
- 1999年, Advances in Information Storage Systems, Vol.10, pp.347 - 355, 英語Piezoelectric Property of CVD ZnO Film for Pressure Micro Sensor(共著)[査読有り]研究論文(学術雑誌)
- 1999年, Integrated Ferroelectrics, 26(1-4) (1-4), 741 - 748, 英語Interfacial Structure and Ferroelectric Properties of PZT/SrRuO3 Heterostructures on MISCUT (001)SrTiO3 (共著)[査読有り]研究論文(学術雑誌)
- 1998年02月, Journal of Korean Physical Society, 32, S1481 - S1484, 英語Piezoelectric characteristics of c-axis oriented Pb(Zr,Ti)O3 thin films(共著)[査読有り]研究論文(学術雑誌)
- 1998年02月, Journal of Korean Physical Society, 32, S1344 - S1348, 英語Continuous Single Crystal PbTiO3 Thin Films Epitaxially Grown on Miscut (001)SrTiO3(共著)[査読有り]研究論文(学術雑誌)
- 1998年, Integrated Ferroelectrics, 21(1-4) (1-4), 451 - 460, 英語Basic Sputtering Process and Ferroelectric Properties of Single-Domain Single-Crystal Thin Films of PbTiO3 (共著)[査読有り]研究論文(学術雑誌)
- 1997年09月, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 36(9B) (9B), 6065 - 6068, 英語[査読有り]研究論文(学術雑誌)
- 1997年06月, Applied Surface Science, 117, 453 - 458, 英語[査読有り]研究論文(学術雑誌)
- 1997年03月, Applied Physics Letters, 70(11) (11), 1378 - 1380, 英語[査読有り]研究論文(学術雑誌)
- 1996年05月, Nuclear Instruments and Methods in Physics Research B, 112(1-4) (1-4), 125 - 128, 英語[査読有り]研究論文(学術雑誌)
- 1996年01月, Applied Physics Letters, 68(3) (3), 328 - 330, 英語[査読有り]研究論文(学術雑誌)
- 1995年09月, Japanese Journal of Applied Physics, 34(9B) (9B), 5211 - 5215, 英語[査読有り]研究論文(学術雑誌)
- 1995年01月, Applied Physics Letters, 66(2) (2), 145 - 147, 英語[査読有り]研究論文(学術雑誌)
- 1994年01月, Japanese Journal of Applied Physics, 33(1B) (1B), 574 - 577, 英語[査読有り]研究論文(学術雑誌)
- 1993年09月, Japanese Journal of Applied Physics, 32(9B) (9B), 4057 - 4060, 英語[査読有り]研究論文(学術雑誌)
- 1993年07月, Japanese Journal of Applied Physics, 32(7A) (7A), L950 - L953, 英語Ferroelectric PbTiO3 Thin Films Prepared by Multi-Ion-Beam Sputter and Ion-Assisted Deposition(共著)[査読有り]研究論文(学術雑誌)
- 1991年07月, Nuclear Instruments and Methods in Physics Research B, 59(60) (60), 920 - 924, 英語Tribological properties of aluminum modified with nitrogen ion implantation and plasma treatment(共著)[査読有り]研究論文(学術雑誌)
- 2020年, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 67thSi基板上エピタキシャルPb(Zr,Ti)O3薄膜の結晶構造と圧電特性の評価
- 2019年02月25日, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 66th, ROMBUNNO.9a‐PA2‐29, 日本語有機圧電エナジーハーベスターにおける振動発電特性の膜厚依存性研究発表ペーパー・要旨(全国大会,その他学術会議)
- 2019年, フッ素化学討論会講演要旨集, 42ndフッ素系高分子圧電体を用いたユニモルフカンチレバー型振動発電デバイスの特性評価
- [東京] : Institute of Electrical Engineers of Japan, 2018年, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 4p, 日本語機械的ストレス下における植物の根系発達過程の解析手法—Analytical method for developmental process of growing root systems under mechanical stress
- 2018年, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65thPb(Zr,Ti)O3薄膜の電圧印加結晶構造変化の組成依存性
- 2017年, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 78thPb(Zr,Ti)O3圧電薄膜の逆圧電効果による結晶構造変化のその場観察
- 30pm1-E-4 圧電薄膜アクチュエータを用いたインセクトスケール圧電ロボットの作製と評価This paper describes the fabrication and characterization on insect-scale piezoelectric thin-film robots. Recently, many insect-scale robots are being developed for medical and engineering field. However, they need a power source and are expensive due to complex structures. In this study, we fabricated an insect-scale robot driven at low voltage and characterized them. We deposited PZT thin films on cantilever-shaped stainless steel (SUS304) substrates, and assembled them into a three-leg insect-scale robot. From experimental results, a robot with no load moved at 2.25 mm/s by applying 13 V_一般社団法人日本機械学会, 2015年10月21日, マイクロ・ナノ工学シンポジウム, 2015(7) (7), "30pm1 - E-4-1"-"30pm1-E-4-2", 日本語
unipolar square-wave voltage at 190 Hz. In contrast, a robot with 72.8 mg mass moved at 3.03 mm/s by applying 20 V_ voltage at 156 Hz. We successfully realized an insect-scale piezoelectric thin-film robot driven at low voltage. - 2A2-R08 圧電薄膜の転写技術を用いたソフトアクチュエータの開発We developed novel soft actuators using piezoelectric thin films. To realize low-cost fabrication method, we also developed a new transfer technique of piezoelectric thin films, which was deposited on temporary stainless steel substrate, to PDMS substrate by using wet etching process. By characterizing crystal structure and driving performance as actuators, we experimentally clarified that transferred Pb(Zr,Ti)O_3 (PZT) thin films have piezoelectric properties. This method might allow us to develop novel MEMS (micro-electro-mechanical systems) devices such as artificial muscle at low-cost fabrication in future.一般社団法人日本機械学会, 2015年05月17日, ロボティクス・メカトロニクス講演会講演概要集, 2015, "2A2 - R08(1)"-"2A2-R08(2)", 日本語
- 2015年, セラミックス基礎科学討論会講演要旨集, 53rdスパッタ法を用いたLi4Ti5O12薄膜の作製とその評価
- 22am2-E3 金属基板上PZT薄膜を用いた振動発電素子の信頼性評価に関する研究This paper describes the reliability of vibration energy harvesters of metal-based Pb(Zr,Ti)O_3 (PZT) thin films. Metal foil cantilevers have attracted attention to improve the lifetime of vibration energy harvesters because of their strong fracture strength. However, the long-term reliability of vibration energy harvesters has not been investigated intensively. In this study, we fabricated the PZT thin-film vibration energy harvesters based on metal foil cantilevers (length: 10 mm, width: 2.5 mm, thickness: 30 μm) and measured their output power for one thousand minutes. From the experimental results, we confirmed that the vibration energy harvester showed quite low degradation of approximately 0.31% by every decade on a logarithmic time scale at the acceleration of 1 m/s^2. On the other hand, we could not demonstrate the precise relationship between the output power and excitation acceleration because of the variation in measured data.一般社団法人日本機械学会, 2014年10月20日, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "22am2 - E3-1"-"22am2-E3-2", 日本語
- 22am2-E1 圧電薄膜を用いた自励振動型気流発電素子の作製および評価We fabricated self-excited vibration energy harvesters of Pb(Zr, Ti)O_3 (PZT) thin films using air flow. To generate a large self-excited vibration, we use 30-μm-thickness stainless steel (SS304) foils as base substrates of PZT thin films. The PZT thin films were deposited directly by rf-magnetron sputtering. To compensate the initial bending of PZT/SS304 substrates due to the thermal stress, we deposited the counter PZT thin films on the backside of SS304 substrates. When the angle of attack was 30°, the energy harvester generated the self-excited vibration above the wind speed of 8 m/s, and the output power reached 19 μW at the wind speed of 12 m/s.一般社団法人日本機械学会, 2014年10月20日, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "22am2 - E1-1"-"22am2-E1-2", 日本語
- 20pm1-E3 金属基板上圧電薄膜アクチュエータを用いたミリメータスケールロボットの作製We fabricated the millimeter-scale robot by metal-based PZT thin-film actuator. PZT thin films were directly deposited on 50-μm-thick Ti substrates by rf-magnetron sputtering. Piezoelectric actuators have simple structure and drive by low voltage. Therefore, in recent year, the robot using piezoelectric materials have been studied. However, piezoelectric actuators cannot generate a large displacement. In this study, we fabricated the millimeter-scale robot(7.5×2.5 cm^2) actuated using resonance since the largest displacement can be generated at the resonance. The movement of the robot depends on the angle between front and rear legs θ and the frequency f of the applied voltage. Under the condition of θ = 123° and f = 10.6 kHz, the robot moved forward at a speed of 6.74 cm/s. On the other hand, under the condition of θ = 123° and f = 5.4 kHz, the robot moved backward at a speed of 1.21 cm/s.一般社団法人日本機械学会, 2014年10月20日, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - E3-1"-"20pm1-E3-2", 日本語
- 20pm1-F3 PZT圧電薄膜および圧電MEMSデバイスの信頼性評価Piezoelectric thin films have attracted attention for MEMS applications. In addition to the deposition of the high-quality piezoelectric thin films, establishment of the measurement technique of the piezoelectric properties, including the evaluation of the reliability, is strongly demanded. In this presentation, we will discuss the characteristics of the proper and inverse piezoelectricity of the thin films, and related properties of the reliability.一般社団法人日本機械学会, 2014年10月20日, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - F3-1"-"20pm1-F3-2", 日本語
- 21am2-A8 ウエットエッチングによる圧電薄膜のPDMS基板上への転写技術This paper reports a simple and high-productive fabrication method of flexible piezoelectric substrate. To realize low-cost fabrication method, we developed a novel transfer technique of piezoelectric thin films onto PDMS substrate based on metal wet etching process. We experimentally clarified that transferred Pb(Zr,Ti)O3 (PZT) thin films by using our developed method have piezoelectric property. This method might allow us to develop novel MEMS (micro-electro-mechanical systems) devices such as wearable sensors and flexible energy harvesters at low-cost fabrication.一般社団法人日本機械学会, 2014年10月20日, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "21am2 - A8-1"-"21am2-A8-2", 日本語
- 20pm1-E2 正・逆圧電効果によるPZT薄膜の圧電定数e_<31,f>の評価We evaluated the transverse piezoelectric coefficient e_<31,f> of Pb(Zr,Ti)O_3 (PZT) thin films from direct and inverse piezoelectric effects using cantilever methods. The PZT/Si unimorph cantilevers (length: 17.8 mm, width: 2.0 mm, thickness: 628 μm) were fabricated by depositing the PZT thin films and the stripe-shaped Pt top electrodes on Pt/Ti/Si substrates by rf-magnetron sputtering. From the e_<31,f> measurement, we confirmed that e_<31,f> largely depended on frequency in both direct and inverse effects. In cases where evaluated from direct piezoelectric effect, e_<31,f> was independent of position and size of electrode and input displacement, and calculated to be -6 C/m^2 above 20 Hz. On the other hand, e_<31,f> evaluated from inverse piezoelectric effect increased with applied voltage, and calculated to be as high as -12 C/m^2 below 500 Hz.一般社団法人日本機械学会, 2014年10月20日, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - E2-1"-"20pm1-E2-2", 日本語
- 2014年, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 61stスパッタ法を用いたLi4Ti5O12薄膜の作製とその評価
- 2014年, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 75thポリ尿素薄膜を用いた焦電・圧電特性および振動発電評価
- 6AM2-A-8 スパッタ法で作製したPZT薄膜積層アクチュエータ(6AM2-A マイクロナノプロセス技術I(センサシンポジウムとの合同セッション))We fabricated multilayer ceramic actuator (MLCA) composed of piezoelectric layers with SrRuO_3 (SRO) internal electrodes by single sputtering deposition. We deposited approximately 500-nm-thick Pb(Zr,Ti)O_3 (PZT) layers on SiO_2/Si substrates through a movable shadow mask. The separated internal SRO electrodes are prepared by sliding the shadow mask and multilayered PZT thin films are deposited on a Si substrate with external electrodes on both sides of the PZT films. The PZT layers of MLCA have perovskite structure. The MLCA with five PZT layers have high-dielectric properties; a relative electric coefficient of approximately 1100 regardless of the number of PZT layers. The piezoelectric displacement of Si cantilever with MLCA increased with the number of PZT layers.一般社団法人日本機械学会, 2013年11月04日, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 107 - 108, 日本語
- 5PM1-C-6 植物寄生性センチュウの行動分析用マイクロ流路デバイス : 流路規格および流路内物質濃度分布の検証(5PM1-C 細胞工学とマイクロ流体デバイス)We present a novel method for chemotaxis assay of plant-parasitic nematode, Meloidogyne incognita by using a PDMS (polydimethylsiloxane) microchannel device. For allowing the nematodes to swim in a simple microchannel, we also developed a protocol by loading an agarose gel into microchannel with power-free pumping method. A 5-μm-wide microchannel array, which is narrower than the body width of the nematodes, can efficiently confine the nematodes in analyzed area. We numerically evaluated the chemical concentration distribution in developed microchannel and successfully related the time-dependent chemical condition to the behavior of nematodes.一般社団法人日本機械学会, 2013年11月04日, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 35 - 36, 日本語
- J212011 コンビナトリアル成膜法によるPMN-PT薄膜の組成依存性評価([J212-01]マイクロ・ナノ材料創成とそのデバイス応用(1))In this study, we deposited Pb(Mg_<1/3>Nb_<2/3>)03-PbTi03 (PMN-PT) thin films on PbTiO_3/Pt/Ti/Si substrates by combinatorial sputtering to optimize the composition ratio of PMN-PT thin films. Compositional gradient PMN-PT thin films were deposited by multi target co-sputtering, namely combinatorial sputtering, and pyrocholre-free PMN-PT thin films with rondom orientation were prepared on PbTiO_3/Pt/Ti/Si substrates. PT compositional ratio is ranging from 0.25 to 0.57, which coverd MPB composition of bulk PMN-PT ceramics (PT = 0.33). We confirmed that relative dielectric constants increase with decreasing PT ratio in PMN-PT films. On the other hand, the PMN-PT thin films showed the maximum piezoelectric coefficients|e_<31,f>| = 7〜8 C/m^2 around PMN-0.45PT, which is shifted from MPB composition of PMN-PT bulk ceramics.一般社団法人日本機械学会, 2013年09月08日, 年次大会 : Mechanical Engineering Congress, Japan, 2013, "J212011 - 1"-"J212011-4", 日本語
- J161013 ステンレス基板上圧電薄膜を用いたMEMSエナジーハーベスター([J161-01]マイクロナノメカトロニクス(1))We developed piezoelectric thin-film MEMS energy harvesters using stainless steel (SUS430) cantilevers to improve fracture toughness as well as to lower the resonant frequency. The large fracture toughness of SUS430 cantilevers overcomes the breakdown of the cantilevers and ensures the long lifetime of the energy harvesters. To simplify the fabrication process, the piezoelectric Pb(Zr,Ti)O_3 (PZT) thin film was directly deposited on the microfabricated SUS430 cantilevers with a 30-μm-thick beam and a tip mass by rf-magnetron sputtering. The X-ray diffraction (XRD) measurement revealed that the PZT thin film has perovskite structure with random orientations. The relative dielectric constant ε_r and the transverse piezoelectric coefficient е_<31,f> were respectively evaluated to be 325 and -4.0 C/m^2, which indicates the figure of merit (FOM) of 0.049. From the evaluation of power generation performance for the PZT thin-film energy harvester (beam length: 5.5 mm, width: 5.0 mm, mass length: 2.0 mm), its maximum output power was 6.8 μW (power density: 1.7 μW/mm^3) under conditions of 367 Hz and 10 m/s^2.一般社団法人日本機械学会, 2013年09月08日, 年次大会 : Mechanical Engineering Congress, Japan, 2013, "J161013 - 1"-"J161013-5", 日本語
- E-2-2 エピタキシャルPZT薄膜を用いた高効率圧電型振動発電素子に関する研究(マイクロナノメカトロニクス(2),口頭発表)We fabricated piezoelectric energy harvesters composed of c-axis oriented Pb(Zr,Ti)O_3 (PZT) thin films transferred onto stainless steel substrates.In order to improve resonance frequency,we designed a cantilever with a tip mass.PZT thin firms were epitaxially grown on MgO substrates using rf-magnetoron sputtering and transferred onto stainless steel substrate by eximer laser liftoff.Transferred PZT thin firms had a low dielectric constant (ε_r=340) and high piezoelectric coefficient(e_<31.1>=-4.76 C/m^2).The energy harvester had a resonance frequency of 143.2 Hz.At the optimal load resistance of 90 kΩ and resonance frequency of 143.2 Hz, theenergy harvester generated output power of 2.02μW at an acceleration of 1m/s^2 and 49μW at acceleration of 7.5 m/s^2.一般社団法人日本機械学会, 2013年03月20日, IIP情報・知能・精密機器部門講演会講演論文集, 2013, 46 - 49, 日本語
- E-2-1 金属基板上PZT薄膜を利用したジャイロセンサーの開発に関する研究(マイクロナノメカトロニクス(2),口頭発表)We developed piezoelectric MEMS gyrosensors composed of PZT thin films. The PZT thin films were directly deposited on the microfabricated metal cantilevers by RF sputtering method.To evaluate basic performance of the gyrosensor,we measured resonance frequency of horizontal and vertical directions.We clearly observed horizontal and vertical resonances at 48.46kHz and 28.77 kHz respectively.Then we calculated the sensitivity analytically.一般社団法人日本機械学会, 2013年03月20日, IIP情報・知能・精密機器部門講演会講演論文集, 2013, 43 - 45, 日本語
- E-1-4 非鉛圧電薄膜(K, Na)NbO_3の微細加工技術(マイクロナノメカトロニクス(1),口頭発表)In this study,we developed microfabrication process of lead-free sodium potassium niobate [(K,Na)NbO_3,KNN]thin films by dry etching.We deposited KNN thin films on Si substrate and evaluated its etching characteristics.We found that Ar/C_4F_8 plasma dry etching was effective for high etching rate 63 nm/min of KNN as well as excellent selectivity of KNN and Cr metal mask 5.7.We conducted fabrication of Pt/KNN/Pt unimorph microcantilevers through KNN etching process.We could fabricate micro-cantilevers without initial deflection and they show high piezoelectric coefficients d_31=110 pm/V.These results suggest that Ar/C_4F_8 plasma dry etching enable to apply for various lead-free piezoelectric MEMS fabrication processes.一般社団法人日本機械学会, 2013年03月20日, IIP情報・知能・精密機器部門講演会講演論文集, 2013, 40 - 42, 日本語
- Elsevier Inc., 2012年11月20日, Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS: Second Edition, 1 - 644, 英語その他
- OS4-1-1 金属基板を用いたPZT圧電薄膜エナジーハーベスト(OS4 電池レス・デバイスのためのエネルギーハーベストの展開)We fabricated piezoelectric MEMS energy harvesters of PZT thin films on the microfabricated stainless steel cantilevers. The 2.5-μm-thick PZT thin films were directly deposited by RF-magnetron sputtering. Direct deposition of PZT thin films can reduces the complexity of the fabrication process of the piezoelectric MEMS energy harvesters. Furthermore, because of strong fracture toughness of stainless steel, the thickness of the cantilevers could be as thin as 30 μm. We confirmed strong diffraction peaks corresponding to pervskite PZT without a pyrochlore phase by XRD, which indicates that the polycrystalline PZT films with pervskite structures were grown on stainless steel cantilevers. We evaluated the power generation performance of the unimorph cantilever (7.5 mm-long, 5.0 mm-wide) with the tip mass of 2.5×10^<-5> kg. The averaged output power reached 6.0 μW at 10 m/s^2 and a low resonant frequency of 367 Hz.一般社団法人日本機械学会, 2012年10月21日, マイクロ・ナノ工学シンポジウム, 2012(4) (4), 91 - 92, 日本語
- P-OS4-2 Fabrication and characterization of lead-free piezoelectric thin filmsWe fabricated composition gradient sodium potassium niobate [(K,Na)NbO_3, KNN] thin films on (111)Pt/Ti/SiO_2/Si by multi-target RF magnetron sputtering to optimize KNN film composition by combinatorial method. We successfully obtained c-axis oriented KNN thin films with perovskite structure on 6-inch Si wafers. The KNN film composition was measured by energy dispersive x-ray spectroscopy (EDX) and we confirmed composition gradient of K/(K+Na) ratio of the KNN thin film on Si wafer along with the line between KNbO_3 and NaNbO_3 targets. This result indicates that the combinatorial sputtering is useful for precise optimization of the deposition condition and film composition of the lead-free KNN thin films.一般社団法人日本機械学会, 2012年10月21日, マイクロ・ナノ工学シンポジウム, 2012(4) (4), 273 - 274, 英語
- OS7-3-6 RFマグネトロンスパッタリング法によるPMN-PT薄膜の圧電特性(OS7 最先端材料が拓くマイクロ・ナノ工学の新展開(3))We evaluated compositional dependence of piezoelectric and dielectric properties of Pb(Mg_<1/3>Nb_<2/3>)_<1-x>Ti_x(O_3(PMN-PT) films by using combinatorial sputtering method. Compositional gradient PMN-PT films were deposited on Pt/Ti/Si substrates by using multi-target sputtering. Piezoelectric and dielectric properties of PMN-PT films were evaluated as a function of composition x in Pb(Mg_<1/3>Nb_<2/3>)_<1-x>Ti_xO_3. Relative dielectric constant and remnant polarization (P_r) increased with decreasing PT ratio.一般社団法人日本機械学会, 2012年10月21日, マイクロ・ナノ工学シンポジウム, 2012(4) (4), 63 - 64, 日本語
- 2011年12月27日, International Workshop on Micro/Nano engineering, 英語Integrated Microfluidic Device for Molecular Transport by Kinesin-Microtubule System[査読有り]
- 2011年12月27日, International Workshop on Micro/Nano engineering, 英語Fabrication of Multi-scale Channels Applicable to Bio-assays[査読有り]
- 2011年12月27日, International Workshop on Micro/Nano engineering, 英語Multilayer Thin-Film Ceramics Fabricated by RF Magnetron Sputtering[査読有り]
- 3-7 圧電薄膜を用いた振動エナジーハーベスターの特性評価(OS3 電池レス・デバイスのためのエネルギーハーベストの展開)We fabricated piezoelectric vibration energy harvesters composed of PZT and lead-free KNN thin films on Si cantilevers and characterized the output voltage and power of those piezoelectric films. Both of the PZT and KNN films were deposited on Pt-coated Si substrates by rf-magnetron sputtering. The harvesters had a simple unimorph cantilever structure with the almost same dimensions, and the characteristics of power generation were examined. When we applied the acceleration of 10m/s^2 on the PZT and KNN energy harvesters, they generated the output power of 1.11 and 1.01μW at the resonant frequency under 10m/s^2, indicating lead-free KNN films are comparable to PZT films for the performance for power generation.一般社団法人日本機械学会, 2011年09月25日, マイクロ・ナノ工学シンポジウム, 2011(3) (3), 35 - 36, 日本語
- MP-50 Ti基板上に成膜したPZT薄膜駆動の圧電MEMSスキャナーミラーに関する研究(ポスターセッション)We have developed Ti-based piezoelectric MEMS scanner mirrors driven by PZT thin films. The 2μm-thick PZT thin films were directly deposited on 50μm-thick Ti substrates by RF-magnetron sputtering. The Ti substrates were preliminary microfabricated into the shape of the horizontal scanner by wet etching, therefore we could fabricate piezoelectric microactuators without photolithographic process. We could confirm strong diffraction peaks corresponding to perovskite PZT without a pyrochlore phase by XRD, which indicates that the polycrystalline PZT films with perovskite structures were grown on Ti substrates. We achieved a mechanical tilt angle of 10.0° at resonant frequency of 23.7kHz by driving voltage of 10V_一般社団法人日本機械学会, 2011年09月25日, マイクロ・ナノ工学シンポジウム, 2011(3) (3), 167 - 168, 日本語
. These horizontal scanning properties would be applicable for the laser displays. - MP-14 KNN非鉛圧電薄膜の微細加工(ポスターセッション)We conducted inductively coupled plasma reactive ion etching (ICP-RIE) for sodium-potassium niobate (KNN) thin films by Ar/ C_4F_8 mixture gas in order to develop lead-free piezoelectric MEMS devices. We prepared Cr metal masks on KNN thin films deposited on Si substrate. The etching rate of the KNN films was about 63nm/min, which is about third times faster than Ar dry etching. The ferroelectric properties of KNN thin films were not changed by etching process. This result suggests that the lead-free piezoelectric MEMS devices can be fabricated by dry etching of KNN thin films without damage to the KNN films.一般社団法人日本機械学会, 2011年09月25日, マイクロ・ナノ工学シンポジウム, 2011(3) (3), 95 - 96, 日本語
- J161041 (K,Na)NbO_3圧電薄膜の微細加工技術([J16104]マイクロナノメカト口ニクス(4))It was investigated that the etching characteristics of lead-free (K,Na)Nb03 (KNN) thin films by the ICP-RIE (Inductive Coupled Plasma ・Reactive Ion Etching) with Ar-C4F8 mixture for the reactive gas. The Ar-C4F8 mixing ratio fixed 10:1, and the chamber pressure was 0.5Pa during the etching. The KNN etching depth has linear relationship as the function of the etching time. The etching rate increased with increasing the antenna power and the bias power. The antenna and the bias dependence of the etching rate show good linearity. These linear relationships indicate the good controllability of the etching. The KNN/Pt selectivity increased with increasing antenna power and decreasing bias power. Thus, the high KNN etching rate was obtained at high antenna power and high bias power condition. The high KNN/Pt selectivity was obtained at high antenna power and low bias power condition. The maximum KNN etching rate and KNN/Pt selectivity were 371.6nm/min. and 85.8, respectively. These results are comparable to that of the conventional piezoelectric PZT films.一般社団法人日本機械学会, 2011年09月11日, 年次大会 : Mechanical Engineering Congress, Japan, 2011, "J161041 - 1"-"J161041-3", 日本語
- 2011年04月25日, 2011 MRS Spring Meeting and Exhibit, pp. AA5.1, San Francisco, USA,, 英語Parallel Microtuble Array with Defined Polarity by Nanotracks and Selective Microtuble Immobilization[査読有り]
- 2011年04月15日, 8th Annual Conference on Foundations of Nanoscience (FNANO11), pp. 44-45, Snowbird, USA, 英語Experimental and Numerical Analysis of Polar Oriented Microtubule Array in Nanotracks[査読有り]
- D-2-1 ナノインプリントリソグラフィとUVリソグラフィの融合によるバイオアッセイ用サブマイクロ灌流デバイスの作製(D-2 設計・プロセス,口頭発表:マイクロナノメカトロニクス)Recently, micro/nano fabrication techniques are applied to bio-assay for detailed biochemical analysis. For example, studies about single molecule enzymology by femtoliter PDMS chambers and real-time imaging of single molecule fluorescence in quartz nano wells are reported. But, these conventional devices for nano-bio assays have difficulties in perfusing solutions in nano structures, so we developed a simple fabrication process of sub-microchannel and microchannel by integrating nanoimprint lithography and UV lithography. The fabricated device consists of sub-microchannel array and two microchannels. These microchannels are used as inlet or outlet of sub-microchannel to deliver solutions. We achieved water injection and solution exchange in 2-μm channels. Water injection pressure was 100 kPa for 1-μm channels and 120 kPa for 2-μm channnels.一般社団法人日本機械学会, 2011年03月18日, IIP情報・知能・精密機器部門講演会講演論文集, 2011, 28 - 29, 日本語
- D-1-4 金属基板上に成膜したPZT薄膜による圧電MEMSスキャナーミラーの研究(D-1 マイクロアクチュエータ,口頭発表:マイクロナノメカトロニクス)In this study, we have developed metal-based MEMS scanner mirrors driven by PZT piezoelectric thin films not only to simplify fabrication process but also to improve fracture toughness of the micro-actuators. The 2 μm-thick PZT thin films were directly deposited on preliminarily microfabricated metal-based substrates of titanium or stainless steel by RF-magnetron sputtering. We could achieve a large mechanical angle tilt of 6.21° at high resonant frequency of 35.02 kHz by low application voltage of 10V_一般社団法人日本機械学会, 2011年03月18日, IIP情報・知能・精密機器部門講演会講演論文集, 2011, 20 - 25, 日本語
. Use of microfabricated metal-based substrates for the PZT deposition enables simpler process and stronger toughness of scanner mirrors compared with the conventional Si-based ones. - 2011年, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 24th Vol.2, 1373 - 1376, 英語
- 2011年, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 24th Vol.2, 1265 - 1268, 英語
- 2011年, 2011 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF/PFM) AND 2011 INTERNATIONAL SYMPOSIUM ON PIEZORESPONSE FORCE MICROSCOPY AND NANOSCALE PHENOMENA IN POLAR MATERIALS, 英語
- 2011年, IDW'11: PROCEEDINGS OF THE 18TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2, 1227 - 1230, 英語Development of Miniaturized Piezoelectric Energy Harvesters
- 2011年, 2011 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF/PFM) AND 2011 INTERNATIONAL SYMPOSIUM ON PIEZORESPONSE FORCE MICROSCOPY AND NANOSCALE PHENOMENA IN POLAR MATERIALS, 英語[査読有り]
- 2011年, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1365 - 1368, 英語
- 2011年, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 956 - 959, 英語[査読有り]
- 2010年12月01日, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, 1, 372 - 374
- MNM-5B-1 Ti基板上に成膜したPZT薄膜による振動発電特性(セッション 5B マイクロエネルギー)We fabricated piezoelectric energy harvesters of PZT thin films on Ti cantilevers. The PZT films were directly deposited on Pt-coated Ti substrates using rf-magnetron sputtering. Although the harvester had a simple cantilever structure without seismic mass, the resonant frequency was as low as 272 Hz because of its thin Ti thickness of 50 μm. Output power had a peak at optimal load resistance of 19 kΩ. When we applied the acceleration of 50 m/s^2 on the harvester, it could generate electric power of 15.7 μW at the resonant frequency without serious damage to PZT/Ti harvesters.一般社団法人日本機械学会, 2010年10月12日, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 207 - 208, 日本語
- MNM-3B-3 高密度圧電MEMS可変ミラーの開発(セッション 3B 情報・精密機器におけるマイクロ・ナノテクノロジー2)This paper reports on a piezoelectric micro-electro-mechanical systems (MEMS) deformable mirrors with high-density actuator array for low-voltage and high-resolution retinal imaging with adaptive optics. The deformable mirror was composed of unimorh structure of piezoelectric zirconate titanate (PZT) thin film deposited on Pt-coated silicon on insulator (SOI) substrate and a diaphragm of 10 mm in diameter formed by backside-etching the Si handle wafer. 61 hexagonal electrodes were laid out on the PZT thin film for the high-density actuator array. In order to reduce the dead space for the lead lines between the electrodes and connecting pads, a polyimide layer with through holes on the electrodes was patterned as an electrical insulator. To confirm the application feasibility of the fabricated DMs, the displacement profile of the actuators were measured by a laser Doppler vibrometer. Independent applications of voltages on individual actuators were confirmed.一般社団法人日本機械学会, 2010年10月12日, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 161 - 162, 日本語
- MNM-1A-2 鏡面・非鏡面X線反射率測定によるタンパク吸着膜構造の統計学的評価(セッション 1A マイクロ・ナノスケールバイオ計測と医用応用)The purpose of this study is to investigate conformations of antibodies immobilized on three kinds of solid surfaces modified with APTES, AEAPTES or GA and their antigen-binding affinities. In the recent developments in biosensors, although the geometric structure of antibodies determines their sensitivity, few studies have focused on their conformations and its effect on their antigen-binding capacity due to a lack of applicable analysis techniques. In this work, specular and off-specular X-ray reflectivity measurement were employed, which enables us to analyze vertical and lateral multilayer structure. The results showed that the antigen-binding affinity on GA was highest among antibodies immobilized on three modified surfaces, although their conformations were almost the same as 'flat-on' analyzed by specular X-ray reflectivity. In contrast, lateral layer structure analysis by off-specular reflection revealed that protein layer on GA before antigen-binding had a relatively-long lateral correlation length and a low fractal dimension which would cause the reduction of steric hindrance for antigens' access to binding sites of antibodies.一般社団法人日本機械学会, 2010年10月12日, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 17 - 18, 日本語
- We propose a new micro-fabrication process of piezoelectric MEMS actuators composed of lead-free KNbO_3-NaNbO_3 (KNN) thin films. The micro-cantilevers were fabricated on silicon on insulator(SOI) substrates, and successively the KNN thin films were directly deposited on them by rf-sputtering. Thus, piezoelectric unimorph micro-cantilevers of lead-free KNN films could be prepared without microfabrication of the KNN films. The dielectric properties of KNN thin films on micro-cantilevers were as good as those on the substrate. When we applied voltage of 20V, we could obtain relatively large tip displacement of up to 5.8μm and the average piezoelectric constant d_<31> was calculated to be -47.4pm/V. This fabrication process is useful for various applications of MEMS devices with new functional materials such as lead-free piezoelectric KNN films.一般社団法人日本機械学会, 2010年09月04日, 年次大会講演論文集 : JSME annual meeting, 2010(8) (8), 193 - 194, 日本語
- 2010年06月18日, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2010(7) (7), 27 - 32, 日本語電気浸透流を用いた開放型流路内での異種細胞配置と細胞間相互作用の観察
- 2010年06月18日, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2010(7) (7), 57 - 61, 日本語モータタンパク質の選択的付加による微小管輸送方向制御
- B-4 圧電マイクロミラーアレーによる光通信デバイスの作製(口頭発表:マイクロナノメカトロニクス)We studied a new fabrication process for a micro mirror array device with piezoelectric unimorph actuators and simulated its actuation. In this fabrication process, piezoelectric thin film (PZT ; Pb(Zr,Ti)O_3) is deposited on SOI substrate by sputtering after actuator parts are released by BHF wet etching. Therefore, patterning or etching piezoelectric layer is not necessary, which means that proposed fabrication process can apply to various piezoelectric devices. Furthermore, we confirmed the actuation of proposed micro mirrors by FEM simulation.一般社団法人日本機械学会, 2010年03月16日, IIP情報・知能・精密機器部門講演会講演論文集, 2010(0) (0), 73 - 74, 日本語
- 2010年, 2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, 248 - 251, 英語
- 2010年, 2010 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS (ISAF), 英語
- 2010年, Proceedings - IEEE Ultrasonics Symposium, 2010 Vol.1, 80 - 85, 英語
- 2010年, The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, pp. 154A-B, Perth, Australia, 8th July,, 英語Development of Hybrid Bio-Device with Self-Organized Huvec Vessels and Artificial Micro-Channels,[査読有り]
- 2010年, The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, pp. 128, Perth, Australia, 7th July,, 英語Surface Modification of Polystyrene by Peo/Ppo Block Copolymer Pluronic to Prevent Blood Adhesion,[査読有り]
- 2010年, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 152 - 155, 英語
- M5-3 サーフェスマイクロマシン技術を用いたPZT薄膜アクチュエータの作製に関する研究(M5 アクチュエータ/フィジカルセンサ)Micro-cantilevers with piezoelectric lead zirconate titanate (PZT) thin film have been widely investigated for various MEMS applications. However, most of them are fabricated by bulk micromachine techniques in silicon on insulator substrate. On the other hand, if micro-cantilevers could be fabricated by surface micromachine techniques, it is advantageous to arrange them in the high density array. In this study, we suggested a new simple process for fabricating PZT unimorph cantilevers by surface micromachining process. Through this process, we fabricated micro actuators with PZT thin films deposited using rf magnetron sputtering. Dielectric loss of PZT thin films are 0.02-0.06, and piezoelectric constant d_<31> calculated from measured displacement of cantilevers was -72.6 pm/V The proposed piezoelectric actuator fabrication process can be applied to various MEMS devices.一般社団法人日本機械学会, 2009年10月15日, マイクロ・ナノ工学シンポジウム, 2009(1) (1), 87 - 88, 日本語
- Piezoelectric MEMS deformable mirrors have been developed for high resolution retina imaging using adaptive optics. For the low voltage drive, piezoelectric PZT thin films-were used to actuate the mirror surface. In this study, we fabricated hexagonal 61-element actuator array to enhance the performance of image correction. In order to reduce the dead space for the lead lines between the actuators, the polyimide insulating layer was coated on the surface of the PZT actuators and lead lines were prepared with the connection to each element. The displacement of each actuator was measured by using a lasor Doppler vibrometer and we confirmed a relatively large displacement of more than 1μm by applying a voltage of lOVpp. Furthermore, we measured the relationship input voltage and displacement and fabricated DMs actuated linearly when applied -20〜20Vpp.一般社団法人日本機械学会, 2009年09月12日, 年次大会講演論文集 : JSME annual meeting, 2009(8) (8), 237 - 238, 日本語
- We propose a novel concept that self-organized vasculature integrates artificial orifices on a microfluidic device using inducible protein VEGF (Vascular Endothelial Growth Factor) for fluid induction into vasculature. Micro gel beads containing VEGF immobilized on orifices, it is able to induce angiogenesis to orifices on embedded channels. Endothelial cells (HUVEC) characteristically organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC were cultured on the device for a day in collagen gel and vasculature was forming on orifices by self-organized. And angiogenetic effect was evaluated quantitatively.一般社団法人日本機械学会, 2009年09月12日, 年次大会講演論文集 : JSME annual meeting, 2009(8) (8), 245 - 246, 日本語
- MCH-01 DEVELOPMENT OF A NOVEL METHOD FOR STRETCHING DNA FIBERS ON MICROBRIDGES FABRICATED BY SINGLE-MASK INCLINED UV LITHOGRAPHY(Micro/Nanomechatronics I,Technical Program of Oral Presentations)In this paper, we proposed the novel method for manipulating DNA fibers on microbridges fabricated by the single mask UV lithography process. Chromosomes were stretched and immobilized on microbridges by the centrifugal force, and the chromosomes could be individually accessible platforms for DNA fiber applications. It was confirmed the validity of the proposed method by applying suspended chromosomes to the FISH analysis.一般社団法人日本機械学会, 2009年06月17日, Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE, 2009, 325 - 326, 英語
- P-MCH-04 Piezoelectric micropumping system using PZT thin films(Micro/Nanomechatronics,Technical Program of Poster Session)In this paper, we propose innovative valveless pumping devices for microfluidic systems. The liquid in the microchannel was transported by generating a traveling wave on the channel wall, which was composed of a piezoelectric Pb(Zr,Ti)O_3 (PZT) thin film actuator array. The PZT thin films were deposited on the silicon-on-insulator (SOI) substrates where microchannels, 200 and 500μm wide, were fabricated. The maximum displacements of the 200 and 500μm wide filled channels at 10 V_一般社団法人日本機械学会, 2009年06月17日, Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE, 2009, 387 - 388, 英語
were about 61 and 219 nm, respectively. By generating a traveling wave on the channel wall, clear liquid flow could be induced with a mean flow velocity of about 118 and 172μm/s for the 200 and 500μm wide channels, respectively. - 2009年01月01日, Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1073 - 1075Streching method for DNA fibers using multi ringed microbridges
- 2009年01月01日, Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 52 - 54
- 2009年, ISAF: 2009 18TH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, 189 - +, 英語
- 2009年, 2009 International Conference on Microtechnologies in Medicine and Biology [MMB2009], pp. 52-53, Quebec, CANADA, Apr, 01-03,, 英語Single-Mask Multidirectional Photolithography with Multiple Resist Coat for Multi-Layered Microfluidic Networks,[査読有り]
- 日本工業出版, 2009年, 超音波テクノ, Vol.21.(No.5.) (No.5.), pp39 - 43, 日本語多成分PZT系薄膜の作製と圧電特性[招待有り]記事・総説・解説・論説等(商業誌、新聞、ウェブメディア)
- A novel concept of a liquid transport technique utilizing frequency modulation and local resonance oscillation is proposed and it is applied to a micromixer. Meta-structure distributing local masses for generating local resonant oscillation is developed. Vibration of the meta-structure with sweeping frequency produces changes in the positions with large oscillation amplitude. This complex structural oscillation makes eddy-like disturbance of flow in a microchamber, and it produces high mixing efficiency. Using this technique produced a mixing index of 0.92 with the volumetric flowrate of 1 μL/min, while it was 0.49 for a conventional technique employing a vibration at a fixed frequency.一般社団法人日本機械学会, 2008年08月02日, 年次大会講演論文集 : JSME annual meeting, 2008(8) (8), 35 - 36, 日本語
- Recently, studies of positional relationships of cells are seemed to be very important for cell biology. We proposed a novel concept that self-organized vasculatum integrates artificial orifices on a device by VEGF (Vascular Endothelial Growth Factor), and a method of uniformly plating HUVEC (Human Umbilical Vein Endothelial Cells) for efficient vasculature integration. Sucking and clamping of Alginate Calcium gel beads containing VEGF, it is able to induce angiogenesis to orifices on embedded channels. Endothelial cells characteristically organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC were cultured on device for about 7 days in the collagen gel and artificial vasculature mere immobilized on orifices by self-organized. And viscosity control of the suspension mixed with HUVEC, collagen gel and medium at low temperature made HUVEC uniformly-plated.一般社団法人日本機械学会, 2008年08月02日, 年次大会講演論文集 : JSME annual meeting, 2008(8) (8), 37 - 38, 日本語
- 2008年08月02日, 日本機械学会年次大会講演論文集, 2008(Vol.8) (Vol.8), 35 - 36, 日本語質量分布型マイクロミキサー
- 2106 圧電薄膜を用いた流路壁面振動による送液デバイスの開発(要旨講演,一般セッション:マイクロナノメカトロニクス)In this paper, we propose innovative liquid pumping devices for μTAS. In this system, microchannels were fabricated in silicon substrates of silicon on insulator(SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the Si device layer of the microchannel. The active microchannel can transport liquid by traveling wave induced on the surface of the piezoelectric vibrating channel by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. Maximum displacement was about 50nm at the applied voltage of 1kHz and 20Vpp. Mean flow velocity of about 16μm/s at primary resonance point of 573kHz and 32μm/s at secondary resonance point of 859kHz were achieved at 20Vpp. Because of the simple structure without valves and diffuser, it is suitable for the integration into μTAS devices.一般社団法人日本機械学会, 2008年03月17日, IIP情報・知能・精密機器部門講演会講演論文集, 2008(0) (0), 225 - 227, 日本語
- 2107 圧電薄膜を用いた高解像度形状可変MEMSミラーに関する研究(要旨講演,一般セッション:マイクロナノメカトロニクス)Piezoelectric MEMS deformable mirror resolution is studied for an adaptive optics device. In previous study, we have developed the piezoelectric MEMS deformable mirrors which have 19 actuator away. To improve the resolution of the deformable mirror, we designed the best electrode size to deflect 5μm when applied 10Vpp. Then, we compared 61CH electrodes with 91CH electrodes in terms of Zernike generation. Zernike polynomials are used to evaluate the mirror surface, and the control system is based on the influence functions for generating Zernike modes. As a result of simulation, we proposed 61CH hexagonal electrodes. The displacement profiles measurements by a laser Doppler vibrometer showed that the each actuator generated displacement of 1.0μm〜1.3μm at 10V. Furthermore we calculated residual RMS of Zernike modes(〜27th) of fabricated deformable mirror.一般社団法人日本機械学会, 2008年03月17日, IIP情報・知能・精密機器部門講演会講演論文集, 2008(0) (0), 228 - 231, 日本語
- 2110 MEMSデバイス上における血管増殖因子を用いた血管構造形成の誘導(要旨講演,一般セッション:マイクロナノメカトロニクス)Recently, studies of positional relationships of cells are seemed to be very important for cell biology. We proposed a novel concept that self-organized vasculature integrates artificial orifices on a device by VEGF (Vascular Endothelial Growth Factor). Sucking and clamping of Alginate Calcium gel beads containing VEGF, it is able to induce angjogenesis to orifices on embedded channels. Endothelial cells have a characteristic property that they organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC (Human Umbilical Vein Endothelial Cells) were cultured on device for about 7 days in the collagen gel and artificial vasculature were immobilized on orifices by self-organized.一般社団法人日本機械学会, 2008年03月17日, IIP情報・知能・精密機器部門講演会講演論文集, 2008(0) (0), 236 - 237, 日本語
- 2008年01月01日, 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference, 1387 - 1389, 英語
- 2008年01月01日, 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference, 363 - 365, 英語
- 2008年, 2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008 Vol.1, 213 - +, 英語
- 2008年, 2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 132 - 133, 英語
- 2008年, 日本機械学会年次大会講演論文集 ,2008/8/2,8,17-18, 日本語補償光学用高解像度圧電MEMSミラーに関する研究
- 2008年, 日本機械学会年次大会講演論文集 ,2008/8/2,8,19-20, 日本語圧電薄膜を用いた流路壁面振動送液デバイスの特性評価
- 2008年, 日本機械学会年次大会講演論文集 ,2008/8/2,8,37-38, 日本語MEMSデバイスを利用した血管構造への流体導入に関する研究
- 2008年, International Symposium on Microchemistry and Microsystems 2008 [ISMM2008], pp. 30, Kyoto, JAPAN, Dec,7,, 英語Development of Rapid Fiber-Fish Process with Micro-Bridges Fabricated by Inclined Uv Lithography,[査読有り]
- 2008年, 化学工業, Vol.59.(No.8.) (No.8.), pp608 - 613, 日本語圧電薄膜によるMEMSデバイス応用[招待有り]記事・総説・解説・論説等(商業誌、新聞、ウェブメディア)
- 2007年12月07日, 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2007(35) (35), 23 - 27, 日本語PZT圧電薄膜とそのMEMS応用
- This paper describes a method for cell sorting using ultrasonic radiation pressure. In previous research literature, we proposed resin-based device that was superior to silicon-based device in the points of optical transparency and simple process. In this paper, we studied some phenomena different from the silicon device. The sound wave reflectivity of SU-8 is smaller than that of silicon. So first, we verified the influence of the wall using PDMS microchannel which had small reflectivity of sound wave. Then we verified the influence of whole device resonance frequency.一般社団法人日本機械学会, 2007年09月07日, 年次大会講演論文集 : JSME annual meeting, 2007(7) (7), 327 - 328, 日本語
- Recently, studies of positional relationships of cells are seemed to be very important for cell biology. We proposed a novel concept that self-organized vasculature integrate artificial orifices on a device. Using SIMPLE (Single Mask inclined Photo-Lithography Exposure) process, it is easy to fabricate embedded channels with orifices. Endothelial cells have a characteristic property that they organize vasculature by their selves in collagen gel. HUVEC (Human Umbilical Vein Endothelial Cells) are cultured on device for about 10 days in matrigel and artificial vasculature were immobilized on orifices by self-organized.一般社団法人日本機械学会, 2007年09月07日, 年次大会講演論文集 : JSME annual meeting, 2007(7) (7), 319 - 320, 日本語
- Piezoelectric deformable mirror for adaptive optics is studied as an adaptive optics device. We have studied the piezoelectric mirror which have 19 upper electrodes. To improve the accuracy of the deformable mirror, we designed two upper electrode types, hexagonal electrodes 37ch and coaxial electrodes 35ch. To compare two electrode types, we calculated deflection of the designed mirrors by using Finite Element Method analysis simulation software, MSC. Marc. Zernike polynomials are used to evaluate the mirror surface, and the control system is based on the influence functions for generating Zernike modes. To compared with three electrodes types, 37ch, 35ch and 19ch, the residual RMS of hexagonal electrodes 37ch was the smallest, less than 0.005μm.一般社団法人日本機械学会, 2007年09月07日, 年次大会講演論文集 : JSME annual meeting, 2007(7) (7), 295 - 296, 日本語
- In this paper, we propose an innovative fluid transport system for μTAS. In this system, microchannels fabricated on silicon chips have active wall of a piezoelectric thin film directly deposited by sputtering on the outside of the microchannels. The active microchannel can transport the fluid by traveling wave induced on the surface of the piezoelectric moving wall by applying sinusoidal voltages to each patterned top electrode with different phase. Since the active microchannel was fabricated by micromachining process and has simple structure without valves and diffuser, it can be applied to μTAS without occupied area. The fluid transport system can be driven by low electric voltage, and integrated with intricate network design.一般社団法人日本機械学会, 2007年09月07日, 日本機械学会年次大会講演論文集, 2007(Vol.7) (Vol.7), 291 - 292, 日本語
- To evaluate the influence of miniaturization on resonance characteristics of extertnally driven micropumps, the modal analyses for systems consisted of an actuator and microchannel including water was carried out. Scale factor defined in this paper quantified the influence of miniaturizing. When a cantilever-typed actuator was miniaturized, it became clear that the oscillation at a high resonant frequency negatively influence on the pump performance (especially when the scale factor is larger than 100 m-1). The influence of additional mass effect of water was negligible for the scale range in this study. When thin-film actuator was used, negative effect observed in cantilever actuator was not emerged. However, additional mass effect of water produced up to a 67% decrease in resonant frequency. We pointed out the necessity to take the additional mass effect of water into consideration when pump is designed.一般社団法人日本機械学会, 2007年09月07日, 日本機械学会年次大会講演論文集, 2007(Vol.7) (Vol.7), 317 - 318, 日本語
- For analysis of cell-cell interactions, we have proposed a microchip fabricated by SIngle-Mask inclined UV Photo Lithography for Embedded network (SIMPLE process). The microchip is made of thick negative photoresist SU-8. In this study, we carried out the toxicity and proliferative tests of SU-8 to pancreatic islet β cell, MIN6. Then, the validity of the proposed device was confirmed by a suction test for MIN6 cells using the fabricated device.一般社団法人日本機械学会, 2007年09月07日, 日本機械学会年次大会講演論文集, 2007(Vol.7) (Vol.7), 325 - 326, 日本語
- 1101 誘電エラストマーポンプ一体型微小分析システム(要旨講演,マイクロメカトロニクス)Loverich et al. have reported a micropump by dielectric elastomer actuation (DEA). The micropump has been fabricated everything from polymer, and achieved highly efficient and low-cost. A microfluidic chip incorporating the DEA micropumps is designed and fabricated in this paper. Assuming an analytical system that should transport sequentially and independently three liquids, the micro fluidic chip was designed. The microfluidic chip consists of three DEA micropumps and check valves. Fabricated microfluidic system performed independent motion of DEA and fluid control. It is possible to transport fluids without mixing. Actual analysis using the chip is future works.一般社団法人日本機械学会, 2007年03月19日, IIP情報・知能・精密機器部門講演会講演論文集, 2007(0) (0), 4 - 6, 日本語
- 1102 SINGLE-MASK傾斜UVリソグラフィにより作製した細胞機能計測用チップ上での細胞培養(要旨講演,マイクロメカトロニクス)Recently, many single-cell analysis systems have been proposed for electroporation and patch clamp. We have proposed a microchip fabricated by the SIngle-Mask inclined UV PhotoLithography for Embedded network (SIMPLE process). The microchip fabricated by SIMPLE process is made of thick negative photoresist SU-8. In this study, we carried out the toxicity and proliferative tests of SU-8 to living cells. Then, we tried to improve cell adhesiveness of substrates by coating poly-L-lysine.一般社団法人日本機械学会, 2007年03月19日, IIP情報・知能・精密機器部門講演会講演論文集, 2007(0) (0), 7 - 8, 日本語
- 1103 樹脂構造体による超音波放射圧を用いた細胞分離デバイスの開発(要旨講演,マイクロメカトロニクス)This paper describes a resin-based device to separate living cells using ultrasonic standing wave (USW). Heretofore silicon is used for USW device structure because it has high reflection property and vertical wall can be fabricated by wet etching. But the resin-based device is needed for the permeation property and simple fabrication process. First, we fabricated the SU-8 resist microchannel by photolithographic method in order to obtain the vertical side walls. Then we carried out cell sorting test using the 1μm beads. As a result, we observed the micro beads moving to acoustic nodes and different phenomenon for the silicon structure device.一般社団法人日本機械学会, 2007年03月19日, IIP情報・知能・精密機器部門講演会講演論文集, 2007(0) (0), 9 - 12, 日本語
- Drag reduction of laminar flow in microchannel is very important for μ-TAS (Micro Total Analysis Systems). Ceramic substrates which consist of alumina particles have rough surface and it is used as a mold to fabricate PDMS rectangular channel with textured wall. Roughness of the wall is depended on diameter of alumina particles. Velocity profile of laminar flow in a textured channel is measured by micro PIV. The measurements reveal that reduction in textured channel can be achieved relative to the classical smooth channel Stokes flow.一般社団法人 日本機械学会, 2007年, 年次大会講演論文集, 2007(0) (0), 321 - 322, 日本語
- 2007年, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 687 - 690, 英語
- 2007年, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 667 - 670, 英語
- 2007年, MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 342 - +, 英語
- 2007年, 2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 627 - 630, 英語
- 2007年, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2163 - 2166, 英語
- 2007年, The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2007), 1498 - 1500, 英語A piezoelectric active microchannel for fluid transport in microTAS[査読有り]
- 2007年, Proc. microTAS2007, 1765 - 1767, 英語A Low-Damage Cell Trapping Array Fabricated by Single-Mask Multidirectional Photolithography with Equivalent Circuit Analysis[査読有り]
- 2007年, セラミックス, Vol.42.(No.3.) (No.3.), pp181 - 187, 日本語強誘電体薄膜のMEMS応用[査読有り]記事・総説・解説・論説等(学術雑誌)
- 806 マイクロチャネルを用いた機能性高分子ゲルの微粒化(2)(OS8-2 医療援用工学における流動ダイナミクス,OS8 医療援用工学における流動ダイナミクス,オーガナイズドセッション)Gel beads containing cells for immunoisolation should be small, monodisperse and spherical enough to ensure the reproducivility of diffusion of nutrients and hormone and to improve biocompatibility. In this paper, we present a new method to generate cell encapsulated micro gel beads for cell transplants. Using water-in-oil (W/O) emulsification and droplet coalescence in a microchannel, presented method generated smaller (less than 300μm in diameter) and more monodisperse gel beads compared to conventional methods. We report the relationships between flow rate and some essential dimensions for cell transplants such as gel beads diameter and circularity.一般社団法人日本機械学会, 2006年10月28日, 流体工学部門講演会講演論文集, 2006, "806 - 1"-"806-4", 日本語
- 804 Single-MASK傾斜UVリソグラフィを用いたエレクトロポレーションチップの開発(2)(OS8-1 医療援用工学における流動ダイナミクス,OS8 医療援用工学における流動ダイナミクス,オーガナイズドセッション)A novel single-mask fabrication method for high-density arrayed micro-orifices and embedded microchannels is proposed for single cell analysis. The process is based on inclined UV lithography to expose a single layered photoresist (SU-8) coated on a patterned mask. Long embedded microchannels with a length/width ratio as high as 1000 can be fabricated by the proposed process. We prepared SU-8 structure with arrayed micro-orifices and embedded microchannels, and carried out an electroporation test with mouse erythroleukemia (MEL) cells to confirm the validity of the proposed system. Nuclear transport factor importinss was fed to the cellular interior by applying the low pulsed voltage.一般社団法人日本機械学会, 2006年10月28日, 流体工学部門講演会講演論文集, 2006(0) (0), "804 - 1"-"804-4", 日本語
- 820 細胞分離における生体細胞の破壊とその評価方法(2)(OS8-5 医療援用工学における流動ダイナミクス,OS8 医療援用工学における流動ダイナミクス,オーガナイズドセッション)In this paper, we propose a fracture model of islets in a shear flow to evaluate the mechanical damage of islets. The fracture model was developed using the relationship between surface area increase and strain energy induced into the islet through the fracture. The islet diameter reduction during the purification process was predicted using the fracture model and numerical calculation using computational fluid dynamics. Comparing experimental and numerical results in terms of the islet size reduction, it is confirmed that the fluid dynamical stress during the islet purification damages islets.一般社団法人日本機械学会, 2006年10月28日, 流体工学部門講演会講演論文集, 2006(0) (0), "820 - 1"-"820-4", 日本語
- In this paper, we investigated the effect of the fluid dynamical stress on islets during islet purification process. Firstly, we developed a fracture model of islets in a shear flow by the fracture test using a cylindrical viscometer. Secondary, we conducted the numerical calculation to estimate the fluid dynamical stress and strain energy during islet purification process. Finally we predicted the islet size reduction during islet purification using the fracture model and the numerical results. Comparing experimental data and numerical result in terms of the islet size reduction, it is confirmed that the fluid dynamical stress during the islet purification damages islets.一般社団法人日本機械学会, 2006年09月15日, 年次大会講演論文集 : JSME annual meeting, 2006(5) (5), 289 - 290, 日本語
- A novel single-mask fabrication method for high-density arrayed micro-orifices and microchannels is proposed and applied for electroporation. The process is based on inclined UV lithography to expose a single layered photoresist (SU-8) coated on a patterned mask. To fabricate the proposed feature precisely, we investigated the inclined angle on exposure process and developing distance of microchannels as a function of time. Using the process, we prepared SU-8 structure with arrayed micro-orifices and microchannels, and carried out electroporation test with MEL cells to confirm the validity of the proposed system. Nuclear transport factor CFP-importinβ was fed to the cellular interior by applying the low pulsed voltage.一般社団法人日本機械学会, 2006年09月15日, 年次大会講演論文集 : JSME annual meeting, 2006(7) (7), 293 - 294, 日本語
- In this paper, a new method to generate cell encapsulated micro Ca-alginate gel beads for cell transplants is presented. Alginate gel beads for immunoisolation should be small, monodisperse and spherical enough to ensure the reproducivility of diffusion of nutrients and hormone and to improve biocompatibility. By using water-in-oil (W/O) emulsification and droplet coalescence in micro fluidic channel, smaller (less than 300μm) and more monodisperse gel beads were obtained compared to conventional methods. We report the relationship of flow rate and some essential dimensions for cell transplants such as gel beads diameter and circularity.一般社団法人日本機械学会, 2006年09月15日, 年次大会講演論文集 : JSME annual meeting, 2006(7) (7), 315 - 316, 日本語
- We have developed piezoelectric RF-MEMS switch using PZT thin films for low-voltage actuation. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111) Pt/Ti/Si substrates by RF-sputtering. The cantilever type actuators composed of PZT thin films and Cr elastic layers were successively fabricated as unimorph structure, but large initial bending arises because of residual stress in the PZT and Cr layers. We optimized the design of the actuators to satisfy flat structure as well as large deflection, and we adopted X type connectors in the middle of the beam. According to FEM simulation (MARC2005) results, the deflection of the optimized actuators composed X type connectors was as high as 3.2μm at a relatively small voltage of 5V. Their resonant frequency was 14.6kHz and larger than cantilever type actuator's one. However, the deflection of the actuators was as high as 400nm at 5V, and the actuators geometry cause the degradation of the deflection characteristic.一般社団法人日本機械学会, 2006年09月15日, 年次大会講演論文集 : JSME annual meeting, 2006(7) (7), 321 - 322, 日本語
- A precise control of various fields is required on local field. The thermal field, that is one of the most general fields, is commonly used, but it is difficult to precise control of the thermal field in local field, because of very small thermal capacity of the micro device. Then, we propose the device for larger thermal gradient and fast response, which has great heat liberation and small heat transfer coefficient. Using MEMS process, this device has TaN heat wear on 6μm SiO_2 membrane. In the experiment, our device achieved the fast response unless 0.2s and thermal gradient over 20℃ between the interval of 250μm.一般社団法人日本機械学会, 2006年09月15日, 日本機械学会年次大会講演論文集, 2006(Vol.7) (Vol.7), 297 - 298, 日本語
- We fabricated a deformable MEMS mirror for adaptive optics. A PZT (Pb (Zr, Ti) O_3) thin film was grown on a (111) Pt/Ti/SOI substrate by RF-sputtering. The Si substrate was etched out up to the buried oxide layer to fabricate a circular membrane. We optimized the design of the upper electrodes using numerical analysis. The size of diaphragm is 15mm in diameter and 22μm thick. Mirror surface whose active area is 8mm in diameter was prepared on the exposed buried oxide layer. We calculated influence function for generating Zernike modes, and observed the deformation of the mirror using a laser Doppler vibrometer. The measurements revealed that the Zernike modes to 7^
terms were generated within the residual of 10〜20%.一般社団法人日本機械学会, 2006年09月15日, 日本機械学会年次大会講演論文集, 2006(Vol.7) (Vol.7), 319 - 320, 日本語 This paper describes a method to separate living cells using ultrasonic standing wave by density difference. Particles in ultrasonic standing wave field are subjected to acoustic force toward the direction corresponding to particles density and compressibility. We fabricated the SU-8 resist microchannel by novel photolithographic method in order to obtain the vertical side walls. We carried out cell sorting test system using the micro beads with diameter of 1μm. As a result, we observed the micro beads moving to acoustic nodes and antinodes by acoustic force in the flowing low or high density medium.一般社団法人日本機械学会, 2006年09月15日, 日本機械学会年次大会講演論文集, 2006(Vol.7) (Vol.7), 305 - 306, 日本語2006年05月15日, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2006(1) (1), 11 - 14, 日本語マイクロチャネルにおけるせん断流が生体組織に与える影響2006年05月15日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-06(1-27) (1-27), 105 - 108, 日本語圧電PZT薄膜を用いた波面補償用形状可変MEMSミラーの開発2006年, 化学とマイクロ・ナノシステム研究会講演要旨集, 13thSingle-MASK傾斜リソグラフィを用いた単一細胞機能計測アレイの開発2006年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 681 - 683, 英語2006年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 131 - 133, 英語2006年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1498 - 1500, 英語2006年, MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 346 - 349, 英語Rapid fabrication process for high aspect-ratio embedded microchannels with orifices using a single SU-8 layer on a mask2006年, 2006 INTERNATIONAL CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE AND BIOLOGY, 116 - +, 英語2006年, 日本機械学会年次大会講演論文集 ,2006/9/15,7,315-316, 日本語マイクロゲルビーズ生成法の開発2006年, 流体工学部門講演会講演論文集,一般社団法人日本機械学会,2006/10/28,,806-1-806-4, 日本語マイクロチャネルを用いた機能性高分子ゲルの微粒化(2)2006年, The 17th International symposium on integrated ferroelectrics (ISIF2006), pp. 7A-469-C, Hawaii, USA, Apr,23,, 英語Piezoelectric Deformable Mems Mirror for Adaptive Optics Composed of Pzt Thin Films on Soi,[査読有り]2006年, 2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006), pp. S15_02, Santa Clara, USA, Jun,21-23,, 英語Piezoelectric Microactuators Composed of Pzt Thin Films on Si Substrates,[査読有り]2006年, 2006 International Meeting for Future of Electron Devices, Kansai, pp. D-2, Kyoto, Japan, Apr,26,, 英語Piezoelectric Rf-Mems Switches Using Pzt Thin Films,[査読有り]2006年, Asia-Pacific Conference of Transducers and Micro-Nano Technology 2006 (APCOT2006), pp. 95-BMFS-A0399, Singapore, Jun,25-28,, 英語Multi-Functional Cell Mapping Device,[査読有り]2006年, 2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006), pp. S11_04, Santa Clara, USA, Jun,21-23,, 英語Tissue Encapsulation with Thin Hydrogel Membrame Using Micro-Emulsification System,[査読有り]A novel cell encapsulation method in microchannel was studied. We used W/O emulsion in the rectangle microchannel fabricated by soft MEMS process. The cell encapsulation process and internal flow of the droplet were visualized. The velocity of the droplet and the cell were measured by the use of the digital image processing. Simple model for prediction of the all velocity was proposed. The theoretical result agreed well with the experimental data.一般社団法人日本機械学会, 2005年09月18日, 年次大会講演論文集 : JSME annual meeting, 2005(2) (2), 17 - 18, 日本語Micro-folding culture system is proposed where cells are cultivated on micropatterned substrates. The substrates have a number of pits with diameter of 100, 150 and 200μm, and has low cell-adhesiveness surface. Mesenchymal stem cells (MSCs) were seeded onto the patterned substrates at a density of 1.1×10^5 cells/cm^2. Aggregates of the MSCs were formed in the pits within 48 hours. Diameter of the aggregates and movement of aggregates had positive and negative correlation with diameter of pits respectively. There is a possibility that some function of aggregate can be controlled by the micro-folding culture.一般社団法人日本機械学会, 2005年09月18日, 年次大会講演論文集 : JSME annual meeting, 2005(6) (6), 123 - 124, 日本語We fabricated a deformable MEMS (Micro Electro Mechanical System) mirror for adaptive optics. PZT (Pb(Zr,Ti)O_3) thin films were grown on the (111) Pt/Ti/SOI substrate by RF-sputtering. Then Al was evaporated on PZT and patterned as eight separated upper electrodes. The size of mirror is 8mm in diameter and 12μm thick. The deflection of the mirror was 110nm at 10V, and it's proportional to applied voltage. To increase the deflection of the mirror, we optimized the electrodes structure by FE-Analysis. The optimize mirror with new electrodes achieved 13.6μm deflection at 10V.一般社団法人日本機械学会, 2005年09月18日, 年次大会講演論文集 : JSME annual meeting, 2005(7) (7), 117 - 118, 日本語We have developed piezoelectric RF-MEMS switches using PZT thin films for low-voltage actuation. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111) Pt/Ti/Si substrates by RF-sputtering. The cantilever and double supported beam type actuators, composed of PZT thin films and Cr/Al elastic layers, were successively fabricated as unimorph structure. The deflection of the actuators was measured using a Laser Doppler Vibrometer and we observed the largest displacement of cantilever type actuator was 1μm and one of the double supported beam type actuator was 100nm at a relatively small voltage of 5V. Initial bending of the double supported beam type actuator caused by residual stress in the PZT and Cr/Al layers had smaller than one of cantilever type actuator, however the displacement magnitude of the double supported beam type actuator enough for switching couldn't obtain. We optimized the design of the actuator by FEM analysis. Fig.2 Fabrication process of PZT micro-actuator一般社団法人日本機械学会, 2005年09月18日, 年次大会講演論文集 : JSME annual meeting, 2005(7) (7), 121 - 122, 日本語We study on the measurement of mechanical properties of a living cardiac myocyte. Micro mechanical sensors were made of PDMS using MEMS technique. The device consists of micro posts which work as vertical cantilevers measuring local contractile forces of a single myocyte. The generated force is calculated from the displacement of the top of the post. We also propose the device with through holes on the micro channel to apply negative pressure to the cell. And this device has additional capability to measure the cell responses to the physical and chemical effects simultaneously with molecular localization in the cell. This approach has the potential to measure the physiological properties of a single myocyte to develop a bio-simulator model.一般社団法人日本機械学会, 2005年09月18日, 日本機械学会年次大会講演論文集, 2005(Vol.7) (Vol.7), 127 - 128, 日本語259 PZT/SUS ユニモルフマイクロアクチュエータの開発と進行波型マイクロポンプへの応用The traveling wave micropump with a thin flow layer is suitable for particle separation and quantification without valves, heat and strong electric field. We have proposed a traveling wave micropump driven by the traveling wave, and demonstrated high efficiency. In this paper, we fabricated a traveling wave micropump composed of flexible microchannel wall made of Polydimethylsiloxane (PDMS) with piezoelectric thin-film unimorph actuators. The piezoelectric thin films were deposited directly on cantilever-shaped stainless steel (SUS) substrates using rfagnetron sputtering technique. The active motion of the particles in the fluid was confirmed by the actuation of the microchannel wall by the piezoelectric actuators.一般社団法人日本機械学会, 2005年08月22日, Dynamics & Design Conference, 2005(0) (0), "259 - 1"-"259-4", 日本語2005年06月22日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-05(21-44) (21-44), 63 - 66, 日本語PZT薄膜/SUSユニモルフアクチュエータの開発およびマイクロポンプへの応用2005年06月22日, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2005(1) (1), 9 - 12, 日本語単一心筋細胞の収縮力を測定する力学センサの開発2005年06月22日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-05(21-44) (21-44), 67 - 70, 日本語μTAS用アトマイザの高機能化と数値設計1104 Si基板上に成膜したPZT薄膜を用いたアクチュエータ(要旨講演,マイクロメカトロニクス)We have developed micro-piezoelectric actuators using PZT thin films. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111)Pt/Ti/Si substrates by rf-sputtering. Micro-cantilevers, composed of PZT thin films and Cr elastic layers, were successively fabricated as unimorph actuators with a length of 500um and width of 90μm. The tip deflection of the cantilevers was measured using a Laser Doppler Vibrometer and we observed piezoelectric vibration level as high as 0.62μm at a relatively small voltage of 5.0V. However, the micro-cantilevers had large initial bending because of residual stress in the PZT and Cr layers.一般社団法人日本機械学会, 2005年03月21日, IIP情報・知能・精密機器部門講演会講演論文集, 2005(0) (0), 40 - 41, 日本語1115 指向性可変ミリ波アンテナの開発(要旨講演,マイクロメカトロニクス)This paper presents a directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is carried out by changing the dielectric constant of ferroelectric film. The ferroelectric film is composed of lanthanum modified lead titanate (PLT) and deposited on micro strip line by RF sputtering. The dielectric constant of PLT has temperature dependence, so by using heater elements we can change the dielectric constant of PLT film. Heater elements are laid out beside micro strip line. By switching heater element the dielectric constant is periodically changed, and the characteristic of antenna will be reconfigured. As a first step, we analyzed two kind of antenna device by using FDTD (Finite Difference Time Domain) method, and fabricated them. And we developed a new numerical analysis program using CIP (Cubic Interpolated Peudo-Particle Scheme) method.一般社団法人日本機械学会, 2005年03月21日, IIP情報・知能・精密機器部門講演会講演論文集, 2005(0) (0), 82 - 83, 日本語1117 MEMS技術を用いた単一細胞の電気生理特性の計測に関する基礎研究(要旨講演,マイクロメカトロニクス)Patient-tailored treatments become possible by simulating behavior of organs, which is affected by the change of the environment such as dispensing of drugs. For example, it is necessary to detail the electrical and mechanical properties of a single living cell to build simulation model of heart. This paper proposes a novel planar patch-clamp device integrating electrode, micro-channel and micro-hole.一般社団法人日本機械学会, 2005年03月21日, IIP情報・知能・精密機器部門講演会講演論文集, 2005(0) (0), 86 - 87, 日本語2506 単一心筋細胞の収縮特性を測定するデバイスの開発(要旨講演,生体治療・医療,バイオ操作・検査)This paper is a study on the measurement of mechanical properties of a living cardiac myocyte. We propose micro mechanical sensors made of PDMS using soft lithography technique. The device consists of micro columns arrays and work as vertical cantilevers measuring local forces of a myocyte. The generated force derives from the displacement of the top of column. This approach has the potential to measure 2-dimensional mechanical properties of a single myocyte to develop a viscoelastic constitutive equation for a bio-simulator model.一般社団法人日本機械学会, 2005年03月21日, IIP情報・知能・精密機器部門講演会講演論文集, 2005(0) (0), 345 - 346, 日本語マグネトロンスパッタ法による(Pb,La)(Zr,Sn,Ti)O3薄膜の作製及び組成比による特性評価The electrical properties and phase transition behavior of (Pb,La)(Zr,Sn,Ti)O_3 (PLZST) thin films prepared on (100)Pt/(100)MgO substrates by RF-magnetron spattering and investigated by X-ray diffraction, relative dielectric constant and P-E hysteresis loops. From X-ray diffraction all PLZST thin films are polycrystalline. With an increase in composition Ti, electrically field-induced AFE-FE switching field(E_一般社団法人日本機械学会, 2005年03月21日, 日本機械学会情報・知能・精密機器部門講演会講演論文集, 2005, 88 - 89, 日本語) is depressed. But Polarization of ferroelectric state are almost equal. These indicate PLZST components is better around boundary between AFE_T and F_R for micro actuator. マイクロアトマイザの開発とその数値設計Cylindrical droplet formation in a W/O (water in oil) system of microchannel was analyzed experimentally and theoretically. The microchannel shape was modified to generate smaller droplet based on theoretical model. Numerical and experimental investigations were carried out with the novel microchannel. It is found that generated droplet was almost the spherical shape, since the diameter was smaller enough than the depth of microchannel. The results indicated that 3-dimensional and more precise theoretical model should be applied to realize the smaller droplet generation.一般社団法人日本機械学会, 2005年03月21日, 日本機械学会情報・知能・精密機器部門講演会講演論文集, 2005, 90 - 92, 日本語進行波によるバルブレスマイクロポンプの作製及びその応用Micropumps are one of the most important microfluidic components in Micro Total Analysis System (μTAS). We have developed a valveless micropump driven by traveling wave, and obtained high energy efficiency. In this paper, the valveless micropump was fabricated by the microfabricatin technique to verify the validity of the pumping principle. The micropump was composed of flexible walls of a microchannel with piezoelectric bimorph cantilevers. Traveling wave was induced on the surface of the microchannel by applying sinusoidal voltages to each piezoelectric cantilever with the different phase, and the peristaltic motion of the channel wall transports the fluid. The fluid flow of the proposed micropump was measured using Micro particle Image Verocimetry (MicroPIV). The traveling wave micropump driven by the piezoelectric actuators is a simple structure without valves and a low cost disposable device.一般社団法人日本機械学会, 2005年03月21日, 日本機械学会情報・知能・精密機器部門講演会講演論文集, 2005, 64 - 65, 日本語914 PZTエピタキシャル膜のガラス基板上への転写と誘電特性評価(GS-4,16 薄膜(1),研究発表講演)We have successfully transferred epitaxial single crystal PZT thin films from MgO substrates onto glass substrates by using micro fabrication process. The internal compressive stress of about 200MPa in the epitaxial PZT thin films was released after the transference. The relative dielectric constant of the PZT thin films increased from 239.4 to 332.9 after the transference with a small decrease of polarization. The crystallinity and crystal orientation of the PZT thin films on the glass substrates were the same to those of epitaxial virgin PZT thin films on the MgO substrates. The transfer process is useful for a fabrication of PZT thin film MEMS devices on any substrates.一般社団法人日本機械学会, 2005年03月18日, 関西支部講演会講演論文集, 2005(80) (80), "9 - 27"-"9-28", 日本語923 誘電率変化を用いた指向性可変ミリ波アンテナの創製(GS-16 センシング,研究発表講演)This paper presents a directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is carried out by changing the dielectric constant of ferroelectric film. The ferroelectric film is composed of lanthanum modified lead titanate (PLT) and deposited on micro strip line by RF sputtering. The dielectric constant of PLT has temperature dependence, so by using heater elements we can change the dielectric constant of PLT film. Heater elements are laid out beside micro strip line. By switching heater element the dielectric constant is periodically changed, and the characteristic of antenna will be reconfigured. As a first step, we analyzed two kind of antenna device by using FDTD(Finite Difference Time Domain) method, and fabricated them. And we developed a new numerical analysis program using CIP(Cubic Interpolated Peudo-Particle Scheme) method.一般社団法人日本機械学会, 2005年03月18日, 関西支部講演会講演論文集, 2005(80) (80), "9 - 45"-"9-46", 日本語2005年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1, 433 - 435, 英語2005年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1, 1075 - 1077, 英語2005年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1, 1108 - 1110, 英語2005年01月01日, Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1, 1183 - 1185, 英語2005年, IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications, 31 - 32, 英語2005年, Advances in Electronic Packaging 2005, Pts A-C, PART C, 2033 - 2036, 英語Development of piezoelectric RF-MEMS switch driven by low operating voltage2005年, 2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, 797 - 798, 英語2005年, 関西支部講演会講演論文集,一般社団法人日本機械学会,2005/3/18,80,11-35-11-36, 日本語MicroTAS用マイクロアトマイザの特性解析2005年, Micro Total Analysis Systems 2005, pp. 160-162, 英語A Novel High Energy Density Dielectric Elastomer Actuator for Micro Anaysis Systems,[査読有り]2005年, Transactions of the Materials Research Society of Japan (MRS-J), pp. 19-22,, 英語Preparation of Pb(Zr,Ti)O3 Thin Films with Graded Composition Profiles by Rf-Sputtering,[査読有り]2005年, The First International Conference on Complex Medical Engineering-CME2005, pp. 103-106,Kagawa International Conference Hall, Takamatsu, Japan, May,15-18,, 英語Improvement on Pump Performance of Traveling Wave Micropump for Fluid Transportation in Microchannel,[査読有り]進行波を用いた薄膜バルブレスマイクロポンプの開発(J22-3 センサ・アクチュエータシステムとその知能化(3),J22 センサ・アクチュエータシステムとその知能化-実環境で活躍するメカトロニクスを目指して)Micropumps play a significant role in fluid transportation system of μ-TAS. We propose a peristaltic micropump system composed of a microchannel made of silicon rubber. Bottom surface of the microchannel is deformed by the electrostatic attraction between upper and lower electrodes made of copper thin films. Since the pump has simple structure using the electrostatic thin film actuators without valves, the fabrication process is also as simple as just stacking organic films or layer on PMMA substrate. The micropump is suitable for low-cost disposable applications. We could observe clear deflection of the channel wall which is proportional to the a square of the applied voltage. In addition, we confirmed active motion of microbeads in the fluid by the peristaltic actuation of electrostatic force.一般社団法人日本機械学会, 2004年09月04日, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 357 - 358, 日本語Piezoelectric thin films have attracted considerable attention in micro-electromechanical systems. In this study, PZT thin films were deposited directly on Pt-coated SUS substrates using RF magnetron sputtering technique. SUS plate has high mechanical strength and stability, which are suitable properties as a substrate for the deposition of a piezoelectric film rather than a conventional substrate such as Si. The x-ray diffraction measurements revealed that the PZT thin films show polycrystalline structure with a perovskite strucure. Piezoelectric vibration of PZT/SUS unimorph cantilevers was clearly observed and the piezoelectric constant e_<31> of the films was calculated to be -1.6 C/m^2.一般社団法人日本機械学会, 2004年09月04日, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 355 - 356, 日本語We aim for the realization of a low-voltage RF-MEMS switch. The switches, we fabricated, consist of unimorph micro-cantilevers using piezoelectric PZT thin films. The PZT thin films are deposited on Si substrate by RF sputtering. The cantilevers can be deflected by applying voltage between upper and lower electrodes, and can cause short-circuit transmission line and ground (off-state). Dimension of the cantilever is 500μm in length, 70μm in width, and 3.1μm in thickness. We were able to obtain the deflection of 0.8μm at the voltage of 10V. We established the fabrication process of RF-MEMS switch using PZT thin films on Si substrate.一般社団法人日本機械学会, 2004年09月04日, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 359 - 360, 日本語This paper presents a directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is carried out by changing the dielectric constant of ferroelectric film. The ferroelectric film is composed of lanthanum modified lead titanate (PLT) and deposited on micro strip line by RF sputtering. The dielectric constant of PLT has temperature dependence, so by using heater elements we can change the dielectric constant of PLT film. Heater elements are laid out beside micro strip line. By switching heater element the dielectric constant is periodically changed, and the characteristic of antenna will be reconfigured. As a first step, we analyzed two kind of antenna device by using FDTD(Finite Difference Time Domain) method, and fabricated them.一般社団法人日本機械学会, 2004年09月04日, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 361 - 362, 日本語Picoliter-sized water droplets are generated for liquid metering system of μTAS using liquid-liquid interface. The dynamics of interfacial wave between two immiscible liquids has an important roll in this system, e.g., controlling droplets size. In this paper, the fluid dynamical study based on the interfacial instability theory is carried out. Comparing experimental and theoretical results, the validity of theoretical approach is discussed in detail.一般社団法人日本機械学会, 2004年09月04日, 年次大会講演論文集 : JSME annual meeting, 2004(2) (2), 69 - 70, 日本語Patient-tailored treatments become possible by simulating behavior of organs, which is affected by the change of the environment such as dispensing of drugs. For example, it is necessary to detail the electrical and mechanical properties of a single living cell to build simulation model of heart. In this paper, we fabricated two kinds of device for cardiac myocyte, the one is for patch-clamp recording and the other is to measure 2-dimensional mechanical forces.一般社団法人日本機械学会, 2004年09月04日, 日本機械学会年次大会講演論文集, 2004(Vol.5) (Vol.5), 341 - 342, 日本語PLD法によるSrTiO_3(100)基板上への(K, Na)NbO_3薄膜のエピタキシャル成長KNbO_3, (K_<0.5>Na_<0.5>)NbO_3 and NaNbO_3 thin films were deposited on (100) SrTiO_3(STO) substrate by Pulsed Laser Deposition (PLD). The obtained (K,Na)NbO_3 films were epitaxially grown on (100)SrTiO_3 with an orientation relationship as (K,Na)NbO_3(001)_日本結晶成長学会, 2004年08月25日, 日本結晶成長学会誌 = Journal of the Japanese Association for Crystal Growth, 31(3) (3), 234 - 234, 日本語∥STO(001) and (K,Na)NbO_3[100]_ ∥STO[100]. The smoothness of the film surface is improved with the increase of the Na content. 2004年02月01日, Physical Review B - Condensed Matter and Materials Physics, 69, 641031 - 6410372004年, 日本機械学会年次大会講演論文集 ,2004/9/4,7,357-358, 日本語進行波を用いた薄膜バルブレスマイクロポンプの開発2004年, 日本機械学会年次大会講演論文集 ,2004/9/4,2,67-68, 日本語極低レイノルズ数流れにおける脈動を用いた混合法2004年, Micro Total Analysis Systems 2004, pp. 439-441, 英語A Novel Micro Device for Measuring the Electromechanical Properties of a Single Myocyte,[査読有り]2004年, The 5th Korea-Japan Conference on Ferroelectrics (Invite), pp. 191, 英語Characterization of Transverse Piezoelectric Properties of Pzt Thin Films for Micro-Actuator Applications,[査読有り]2004年, The 5th Korea-Japan Conference on Ferroelectricity, pp. 85, The Hoam Convention Center, Seoul National University, Seoul, Korea, Aug,18-21, 英語Preparation and Characterization of Pb(Zr, Ti)O3 Thin Films Deposited on Sus Substrates by RF Magnetron Sputtering,[査読有り]2004年, 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences(microTAS2004), pp. 234-236, Malmo Exhibition and Convention Center, Malmo, Sweden,Sep,26-30, 英語High-Efficient Micropump with Geometry Optimization of Microchannel Using Computational Fluid Dynamics,[査読有り]Miniaturized biochemical analysis systems, so-called a μTAS, have gained considerable interest for research and development in new-bio-engineering. However, there is a difficulty in mixing fluids in the micro device because of extremely low Reynolds number. So, to develop an effective micromixer which can fully perform at low Reynolds number flow is important to realize integrated μTAS. In our previous experiment based on flow visualization technique, it was found that the diffusion phenomena of two species must play an important role in mixing process in such a creeping flow. The effect of diffusion should be investigated in detail to evaluate the performance of passive mixer. In this paper, we make a numerical study on the suitable flow condition for μTAS and the diffusion characteristics of passive mixer by means of curvilinear coordinate transformation technique.一般社団法人日本機械学会, 2003年08月05日, 年次大会講演論文集 : JSME annual meeting, 2003(5) (5), 325 - 326, 日本語The paper presents the possibility of a low-voltage micro-switch for RF application. The switches, we fabricated, consist of micro-cantilevers using piezoelectric PZT thin films with the length of 300μm and the width of 50μm. The cantilevers are actuated as unimorph actuators that can be deflected by applying voltage between upper and lower electrodes. We could obtain large deflection of 4.3μm even at the low voltage of 6.0V, which is well compatible with conventional IC drivers. This result indicates that the RF-MEMS switch using piezoelectric PZT thin films is much advantageous to the low voltage switching devices compared with conventionally proposed electrostatic ones.一般社団法人日本機械学会, 2003年08月05日, 年次大会講演論文集 : JSME annual meeting, 2003(7) (7), 221 - 222, 日本語In this paper we propose hybrid piezoelectric materials composed of thin film PZT on organic layer. It is well-known that the PZT film shows excellent piezoelectric properties and is easy for microfabrication as MEMS devices. However deposition of PZT films need high process temperature as high as 500℃ which makes it difficult to integrate them on flexible organic materials. In this study we prepared PZT films on epitaxial MgO substrates in advance, and then they were glued onto adhesive polyimide layer. Finally the MgO substrates were etched away and the PZT films combined with the polyimide layer could be obtained as the hybrid materials. We have fabricated microactuators for micropumps using this film. The PZT films on the polyimide layer were integrated on Si substrates with microchannel and pressure cavities, and piezoelectric actuation was evaluated using laser Doppler displacement meter. We have observed clear piezoelectric displacement as high as 250nm at 10V, indicating the hybrid piezoelectric materials is useful for the MEMS applications.一般社団法人日本機械学会, 2003年08月05日, 年次大会講演論文集 : JSME annual meeting, 2003(7) (7), 225 - 226, 日本語This paper presents a frequency and directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is achieved by actuating conductor matrix element with micro actuator. The conductor matrix elements are arranged in the upper conductor layer and the lower conductor layer. If a distance between the upper and the lower conductor elements is short enough, the separated conductor elements act as continuous antenna line. By actuating the conductor elements, the electrically connected antenna line is easily disconnected. Consequently, the shape of antenna is reconfigured fitting to wavelength and receiving/radiating wave direction. As a first step, we have fabricated a millimeter antenna device and measured its characteristic. We have confirmed the characteristic radiation of the millimeter wave antenna, indicating this structure is effective to control the path of millimeter current.一般社団法人日本機械学会, 2003年08月05日, 日本機械学会年次大会講演論文集, 2003(Vol.7) (Vol.7), 213 - 214, 日本語一般社団法人日本機械学会, 2003年01月20日, バイオエンジニアリング講演会講演論文集, 2003(15) (15), 229 - 230, 日本語221 進行波を用いた圧電バルブレスマイクロポンプの研究一般社団法人日本機械学会, 2003年01月20日, バイオエンジニアリング講演会講演論文集, 2003(15) (15), 231 - 232, 日本語222 界面不安定性を用いたマイクロミキサーの開発2003年, 4th Asian Meeting on Ferroelectrics (AFM-4), pp. 51, 英語Characterization of Transverse Piezoelectric Properties of Epitaxial Pb(Zr,Ti)O3 Thin Films[査読有り]2003年, Micro Total Analysis Systems 2003, pp. 997-1000, 英語Characterization of Piezoelectric Micropump Driven by Traveling Waves Isaku Kanno, Satoyuki Kawano, Shunsuke Yakushiji, Hidetoshi Kotera,[査読有り]2003年, Micro System Technologies, pp. 571-573, 英語Kelvin-Helmholtz Instability Theory in Development of Microfluidic Mixing System,[査読有り]2003年, Micro System Technologies, pp. 526-528,, 英語Frequency and Directivity Reconfigurable Antenna for Millimeter-Wave[査読有り]2003年, The 5th Euromech Solid Mechanics Conference, pp., 英語Crack Initiation at Free Edge of Interface between Piezoelectric Thin Films on a Substrate[査読有り]1998年10月23日, シンポジウム電磁力関連のダイナミックス講演論文集, 10, 483 - 486, 日本語ZnO薄膜を用いたマイクロカンチレバー型アクチュエータ日本表面科学会, 1998年, 表面科学, 19(7) (7), 463 - 468, 日本語[査読有り]記事・総説・解説・論説等(学術雑誌)
■ 書籍等出版物- その他, Elsevier, 2019年, 英語, Chap_8: "Fundamentals of piezoelectric thin films for microelectromechanical systems"Nanostructures in Ferroelectric Films for Energy Applications - Domains, Grains, Interfaces and Engineering Methods -学術書
- その他, Elsevier, 2019年, 英語, Chap9 "Structural optimization of piezoelectric thin-film vibration energy harvesters based on electric equivalent circuit model"Nanoscale Ferroelectric-Multiferroic Materials for Energy Harvesting Applications学術書
- その他, シーエムシー出版, 2014年, 日本語, 第4章 圧電セラミックスの薄膜化と圧電特性測定技術高分子圧電材料と無機圧電セラミックスの基礎から応用学術書
- その他, CRC Press, 2013年, 英語MEMS Fundamental Technology and Applications学術書
- その他, CRC Press, 2013年, 英語, Chap 8"Piezoelectric Thin Films and Their Application to Vibration Energy Harvesters"Energy Harvesting with Functional Materials and Microsystems学術書
- その他, NTS, 2012年, 日本語環境発電ハンドブック学術書
- その他, CRC press, 2012年, 英語Integrated Microsystems学術書
- IEEE IFCS ISAF 2020, 2020年07月Piezoelectric MEMS as a Micro-Power Source[招待有り]口頭発表(基調)
- 第37回強誘電体会議, 2020年05月Piezoelectric PZT Thin-Film Transformer with a Ring-Dot Structure口頭発表(一般)
- 第37回強誘電体会議, 2020年05月両端支持ユニモルフ梁を用いた薄膜の正圧電係数の評価方法口頭発表(一般)
- 第67回応用物理学会春季学術講演会, 2020年03月Si 基板上エピタキシャル(K, Na)NbO3薄膜の結晶構造および圧電特性の組成依存性口頭発表(一般)
- 第67回応用物理学会春季学術講演会, 2020年03月Si基板上エピタキシャルPb(Zr,Ti)O3薄膜の結晶構造と圧電特性の評価口頭発表(一般)
- 第67回応用物理学会春季学術講演会, 2020年03月高温 Pt マイクロヒーターの開発口頭発表(一般)
- 第67回応用物理学会春季学術講演会, 2020年03月Piezoelectric PZT thin-film transformers with a ring-dot structureポスター発表
- 第67回応用物理学会春季学術講演会, 2020年03月スパッタ法による積層誘電体薄膜作製技術口頭発表(招待・特別)
- 第67回応用物理学会春季学術講演会, 2020年03月全固体リチウムイオン薄膜電池の多層化口頭発表(一般)
- 第10回 マイクロ・ナノ工学シンポジウム, 2019年11月圧電薄膜を用いた圧電トランスの設計、試作および評価ポスター発表
- 第80回応用物理学会秋季学術講演会, 2019年09月SSPDの高性能化に向けたNbTiN薄膜の成膜条件の検討口頭発表(一般)
- 第80回応用物理学会秋季学術講演会, 2019年09月Si基板上のエピタキシャル(K,Na)NbO3薄膜の結晶構造および圧電特性の評価口頭発表(一般)
- 第80回応用物理学会秋季学術講演会, 2019年09月(K, Na)NbO3薄膜への添加物効果口頭発表(一般)
- 第80回応用物理学会秋季学術講演会, 2019年09月RFスパッタリング装置を用いたガラス基板上へのPZT薄膜成膜ポスター発表
- 第83回半導体・集積回路技術シンポジウム, 2019年08月圧電薄膜を用いた振動発電技術口頭発表(招待・特別)
- 強誘電体応用会議2019, 2019年05月シンクロトロン放射光X線回折を用いたエピタキシャルPZT薄膜の微視的圧電特性組成依存性評価口頭発表(一般)
- 第66回応用物理学会春季学術講演会, 2019年03月, 日本語, 応用物理学会, 東京都, 国内会議有機圧電エナジーハーベスターにおける振動発電特性の膜厚依存性ポスター発表
- IIP2019 情報・知能・精密機器部門(IIP部門)講演会, 2019年03月, 日本語, 東洋大学, 国内会議圧電薄膜を用いた振動発電素子開発[招待有り]口頭発表(招待・特別)
- 第66回応用物理学会春季学術講演会, 2019年03月, 日本語, 東京工業大学, 国内会議圧電薄膜を用いた振動発電技術[招待有り]口頭発表(招待・特別)
- 第66回応用物理学会春季学術講演会, 2019年03月, 日本語, 東京工業大学, 国内会議V2O5正極を用いた全固体リチウムイオン薄膜電池の作製口頭発表(一般)
- 第66回応用物理学会春季学術講演会, 2019年03月, 日本語, 東京工業大学, 国内会議(K, Na)NbO3薄膜へのドーピング効果口頭発表(一般)
- IIP2019 情報・知能・精密機器部門(IIP部門)講演会, 2019年, 日本語, 国内会議マイクロフォースセンサを用いた根の機械的性質の解析口頭発表(一般)
- PowerMEMS2018, 2018年12月, 英語, FL, USA, 国際会議Equivalent circuit model of piezoelectric vibration energy harvesters composed of trapezoidal unimorph cantileversポスター発表
- 71th ICAT, 2018年10月, 英語, Penn State, USA, 国際会議Sputtering deposition of piezoelectric PZT thin films for MEMS applications[招待有り]口頭発表(招待・特別)
- 第79回応用物理学会秋季学術講演会, 2018年09月, 日本語, 名古屋国際会議場, 国内会議電圧印加における非鉛(K,Na)NbO3薄膜の結晶構造変化その場観察口頭発表(一般)
- 2018年度日本機械学会年次大会, 2018年09月, 日本語, 関西大学, 国内会議圧電薄膜技術:基礎研究から実用化まで口頭発表(基調)
- 第79回応用物理学会秋季学術講演会, 2018年09月, 日本語, 応用物理学会, 名古屋市, 国内会議ユニモルフカンチレバー型有機圧電薄膜の振動発電特性ポスター発表
- 第79回応用物理学会秋季学術講演会, 2018年09月, 日本語, 名古屋国際会議場, 国内会議V2O5正極を用いた全固体リチウムイオン薄膜電池の作製口頭発表(一般)
- The 10th Japan-China Symposium on Ferroelectric Materials and Their Applications (JCFMA10), 2018年09月, 英語, Inuyama, Japan, 国際会議PZT thin-film Piezoelectric Vibration Energy Harvesters[招待有り]口頭発表(招待・特別)
- 第79回応用物理学会秋季学術講演会, 2018年09月, 日本語, 名古屋国際会議場, 国内会議Pb(Zr,Ti)O3圧電薄膜の正圧電特性の温度依存性に関する研究口頭発表(一般)
- The 10th Japan-China Symposium on Ferroelectric Materials and Their Applications (JCFMA10), 2018年09月, 英語, Kobe, Japan, 国際会議In-situ synchrotron diffraction study of epitaxial and polycrystalline Pb(Zr,Ti)O3 thin filmsunder an applied electric fieldポスター発表
- IWPMA2018, 2018年09月, 英語, Kobe, Japan, 国際会議Doping effect of lead-free K0.5Na0.5NbO3 thin films by multi-target RF-magnetron sputtering口頭発表(一般)
- 第79回応用物理学会秋季学術講演会, 2018年09月, 日本語, 名古屋国際会議場, 国内会議(K,Na)NbO3および(Pb,La)TiO3薄膜を用いた光起電力特性評価口頭発表(一般)
- 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018), 2018年05月, 英語, Hiroshima, Japan, 国際会議Numerical Designs of Thin-Film-Formed Piezoelectric Vibration Energy Harvesters口頭発表(一般)
- 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018), 2018年05月, 英語, Hiroshima, Japan, 国際会議Direct Observation of Inverse Piezoelectric Effect of Pb(Zr,Ti)O3 Thin Films Using Synchrotron X-ray Diffraction口頭発表(一般)
- 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018), 2018年05月, 英語, Hiroshima, Japan, 国際会議A Newly Developed High Performance PZT Thin Films by Using Sputtering and Sol-Gel Hybrid Method for Piezo-MEMS Device口頭発表(一般)
- 日本学術振興会 薄膜第131委員会 第283回委員会・第289回研究会, 2018年04月, 日本語, 京都テルサ, 国内会議ナノエネルギ―技術への期待と展望[招待有り]口頭発表(招待・特別)
- IIP2018 情報・知能・精密機器部門(IIP部門)講演会, 2018年03月, 日本語, 東洋大学, 国内会議等価回路モデルを用いた圧電薄膜振動発電素子の設計と評価口頭発表(一般)
- IIP2018 情報・知能・精密機器部門(IIP部門)講演会, 2018年03月, 日本語, 東洋大学, 国内会議V2O5正極を用いた全固体薄膜リチウムイオン電池の作製とその評価口頭発表(一般)
- 第65回応用物理学会春季学術講演会, 2018年03月, 日本語, 早稲田大学, 国内会議Pb(Zr,Ti)O3薄膜の電圧印加結晶構造変化の組成依存性口頭発表(一般)
- 電気学会センサ・マイクロマシン部門 部門大会 第35回「センサ・マイクロマシンと応用システムシンポジウム」, 2018年, 日本語, 国内会議機械的ストレス下における植物の根系発達過程の解析手法ポスター発表
- 日本機械学会2018年度年次大会, 2018年, 日本語, 国内会議マイクロフォースセンサを用いた根の成長挙動解析口頭発表(一般)
- 日本機械学会2018年度年次大会, 2018年, 日本語, 国内会議マイクロピラーアレイを用いた根の機械的ストレス応答の解析口頭発表(一般)
- 6th International Workshop on Piezoelectric MEMS (PiezoMEMS2018), 2018年01月, 英語, Orlando, FL, 国際会議In-situ observation of crystallographic deformation of Pb(Zr,Ti)O3 thin films by synchrotron x-ray diffractionポスター発表
- PowerMEMS2017, 2017年11月, 英語, Kanazawa, Japan, 国際会議THE PIEZOELECTRIC PZT THIN FILMS DEPOSITED ON METAL SUBSTRATESポスター発表
- The 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2017), 2017年11月, 英語, 日本機械学会, 金沢市, 国際会議Orientation Dependence of Power Generation on Piezoelectric Energy Harvesting Using Stretched Ferroelectric Polymer Filmsポスター発表
- PowerMEMS2017, 2017年11月, 英語, Kanazawa, Japan, 国際会議MULTILAYER PIEZOELECTRIC MEMS ENERGY HARVESTER BASED ON LONGITUDINAL EFFECT口頭発表(一般)
- PowerMEMS2017, 2017年11月, 英語, Kanazawa, Japan, 国際会議IEZOELECTRIC PZT THIN FILMS DEPOSITED ON STAINLESS STEEL MESH口頭発表(一般)
- PowerMEMS2017, 2017年11月, 英語, Kanazawa, Japan, 国際会議DEVELOPMENT OF PIEZOELECTRIC VIBRATION ENERGY HARVESTERS FOR BATTERY-LESS SMART SHOESポスター発表
- 第78回応用物理学会秋季学術講演会, 2017年09月, 日本語, 応用物理学会, 福岡市, 国内会議分極制御有機圧電薄膜による振動発電素子[招待有り]口頭発表(招待・特別)
- 日本セラミックス協会 第30回秋季シンポジウム, 2017年09月, 日本語, 神戸大学, 国内会議圧電薄膜とMEMSデバイス応用[招待有り]口頭発表(招待・特別)
- 2017年度日本機械学会年次大会, 2017年09月, 日本語, 埼玉大学, 国内会議シューズ埋め込み型圧電振動発電素子の作製・評価口頭発表(一般)
- 017年度日本機械学会年次大会, 2017年09月, 日本語, 埼玉大学, 国内会議インセクトスケールロボットを目的とした圧電薄膜アクチュエータの作製口頭発表(一般)
- 第78回応用物理学会秋季学術講演会, 2017年09月, 日本語, 福岡国際会議場, 国内会議Pb(Zr,Ti)O3圧電薄膜の電気的信頼性評価に関する研究口頭発表(一般)
- 福岡国際会議場, 2017年09月, 日本語, 国内会議Pb(Zr,Ti)O3圧電薄膜の逆圧電効果による結晶構造変化のその場観察口頭発表(一般)
- International workshop on piezoelectric materials and applications (IWPMA2017), 2017年09月, 英語, Virginia, 国際会議Measurement of piezoelectric characteristics of thin films[招待有り]口頭発表(招待・特別)
- 応用物理学会 薄膜・表面分科会 セミナー, 2017年07月, 日本語, 産総研 臨海副都心センター, 国内会議圧電薄膜を利用した振動発電[招待有り]口頭発表(招待・特別)
- 強誘電体応用会議, 2017年06月, 日本語, 京都, 国内会議ディップコート法による金属箔上へのPZT薄膜の作製と評価口頭発表(一般)
- 8th International Conference on Electroceramics (ICE2017), 2017年05月, 英語, Nagoya, 国際会議Evaluation of piezoelectric characteristics of thin films for MEMS applications[招待有り]口頭発表(招待・特別)
- IIP2017 情報・知能・精密機器部門(IIP部門)講演会, 2017年03月, 日本語, 東洋大学 白山キャンパス, 国内会議薄膜型全固体リチウムイオン電池の作製と評価口頭発表(一般)
- 第64回応用物理学会春季学術講演会, 2017年03月, 日本語, パシフィコ横浜, 国内会議ディップコート法によるステンレス箔上へのPZT薄膜の作製口頭発表(一般)
- IIP2017 情報・知能・精密機器部門(IIP部門)講演会, 2017年03月, 日本語, 東洋大学 白山キャンパス, 国内会議PZT薄膜を用いた圧電型エナジーハーベスターの作製と評価口頭発表(一般)
- 第64回応用物理学会春季学術講演会, 2017年03月, 日本語, パシフィコ横浜, 国内会議Pb(Zr,Ti)O3薄膜の斜め成膜およびその特性評価に関する研究口頭発表(一般)
- International Symposium on Micro-Nano Science and Technology 2016, 2016年12月, 英語, Tokyo, 国際会議Design and characterization of cantilever-type piezoelectric MEMS microphones口頭発表(一般)
- 日本機械学会 2016年度年次大会, 2016年09月, 日本語, 国内会議根の成長パターン解析を目的としたマイクロピ ラーデバイスの開発口頭発表(一般)
- 日本機械学会 2016年度年次大会, 2016年09月, 日本語, 国内会議圧電薄膜振動子を用いたシリンダー型 MEMS ジャイロスコープの特性評価口頭発表(一般)
- The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2016), 2016年09月, 英語, Pari, France, 国際会議Shoe-mounted vibration energy harvester of PZT piezoelectric thin films on metal foils口頭発表(一般)
- 11th Energy harvesting workshop, 2016年09月, 英語, Arlington, Virginia, USA, 国際会議Piezoelectric Thin Films on Metal Substrates for Flexible and Robust Energy Harvesting[招待有り]口頭発表(招待・特別)
- 第8回日中強誘電体応用会議, 2016年09月, 英語, 筑波, 国際会議Measurement method of transverse piezoelectric properties of thin films[招待有り]口頭発表(招待・特別)
- 第77回応用物理学会秋季学術講演会, 2016年09月, 日本語, 朱鷺メッセ, 国内会議KNN 薄膜を用いた光起電力特性評価ポスター発表
- 第8回日中強誘電体応用会議, 2016年09月, 英語, 筑波, 国際会議Compositional dependence of BaTiO3-xBaSnO3 piezoelectric thin films prepared by combinatorial sputtering口頭発表(一般)
- 第77回応用物理学会秋季学術講演会, 2016年09月, 英語, 朱鷺メッセ, 国内会議Compositional dependence of BaTiO3-xBaSnO3 piezoelectric thin films prepared by combinatorial sputtering口頭発表(一般)
- the 13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016, 2016年08月, 英語, Jeju, Korea, 国際会議Sputtering deposition of piezoelectric thin films[招待有り]口頭発表(招待・特別)
- 5th International Workshop on Piezoelectric MEMS, 2016年05月, 英語, Grenoble, France, 国際会議Multilayer piezoelectric thin films[招待有り]口頭発表(招待・特別)
- 第63回応用物理学会春季学術講演会, 2016年03月, 日本語, 東京都, 国内会議薄膜材料の正・逆圧電特性評価口頭発表(一般)
- 第66回応用物理学会春季学術講演会, 2016年03月, 日本語, 東京都, 国内会議積層圧電薄膜の作製およびその実効的圧電特性評価口頭発表(一般)
- 第64回応用物理学会春季学術講演会, 2016年03月, 日本語, 東京都, 国内会議コンビナトリアルスパッタ法を用いたPMN-PZ-PT薄膜の組成依存性評価口頭発表(一般)
- 第65回応用物理学会春季学術講演会, 2016年03月, 日本語, 東京都, 国内会議PZT圧電薄膜の正圧電特性経時変化口頭発表(一般)
- 第20回 関西大学先端科学技術シンポジウム, 2016年01月, 日本語, 吹田市, 国内会議圧電MEMSとエナジーハーベスティング応用[招待有り]口頭発表(招待・特別)
- "The 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2015) Journal of Physics: Conference Series", 2015年12月, 英語, Boston, USA, 国際会議PIEZOELECTRIC MEMS FOR ENERGY HARVESTING口頭発表(一般)
- 化学とマイクロ・ナノシステム学会第32回研究会, 2015年11月, 日本語, 国内会議オンチップ力計測手法による根の成長メカニズム解析ポスター発表
- 第 7 回マイクロ・ナノ工学シンポジウム, 2015年10月, 日本語, 新潟県, 国内会議圧電薄膜アクチュエータを用いたインセクトスケール圧電ロボットの作製と評価口頭発表(一般)
- 第76回応用物理学会秋季学術講演会, 2015年09月, 日本語, 名古屋, 国内会議ステンレス基板上PZT薄膜の光誘起ひずみ効果口頭発表(一般)
- 10th Energy Harvesting Workshop, 2015年09月, 英語, Virginia, USA, 国際会議Self-excited vibration energy harvesters of PZT thin films on stainless-steel cantilevers by airflow口頭発表(一般)
- 第76回応用物理学会秋季学術講演会, 2015年09月, 日本語, 名古屋市, 国内会議Pb(Hf,Ti)O3薄膜の作製と組成依存性評価口頭発表(一般)
- the 7th China-Japan Symposium on Ferroelectric Materials and Their Applications, 2015年08月, 英語, Beijin, China, 国際会議Piezoelectric thin films for MEMS口頭発表(一般)
- 2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, 2015年06月, 英語, Kobe, 国際会議Reliability of vibration energy harvesters of PZT thin films on stainless steel cantilevers口頭発表(一般)
- 2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, 2015年06月, 英語, Kobe, 国際会議Development of simple microrob ot using piezoelectric thin film actuator on metal substrate口頭発表(一般)
- 強誘電体応用会議, 2015年05月, 日本語, 京都市, 国内会議正・逆圧電効果によるPZT薄膜の圧電定数e31,fの測定口頭発表(一般)
- 強誘電体応用会議, 2015年05月, 日本語, 京都市, 国内会議圧電薄膜のMEMS応用口頭発表(一般)
- 第62回応用物理学会春季学術講演会, 2015年03月, 日本語, 国内会議自励振動を利用した圧電薄膜気流振動発電素子口頭発表(一般)
- 第62回応用物理学会春季学術講演会, 2015年03月, 日本語, 国内会議UV-LED光駆動の圧電薄膜アクチュエータの作製口頭発表(一般)
- Fourth International Conference on Multifunctional, Hybrid and Nanomaterials (Hybrid Materials 2015), 2015年03月, 英語, Spain, 国際会議Piezoelectric vibration energy harvesters with stretched and multi-stacked organic ferroelectric filmsポスター発表
- 第62回応用物理学会春季学術講演会, 2015年03月, 日本語, 国内会議Pb(Hf,Ti)O3薄膜の作製と圧電特性評価口頭発表(一般)
- 平成26年度応用物理学会関西支部第3回講演会, 2015年02月, 日本語, 国内会議自励振動を利用した圧電薄膜気流発電素子口頭発表(一般)
- 平成26年度応用物理学会関西支部第3回講演会, 2015年02月, 日本語, 国内会議UV-LED光駆動圧電薄膜アクチュエータの作製口頭発表(一般)
- 第53回セラミックス基礎科学討論会, 2015年01月, 日本語, 国内会議積層圧電薄膜を用いた高効率MEMSアクチュエータの開発口頭発表(一般)
- 第53回セラミックス基礎科学討論会, 2015年01月, 日本語, 国内会議スパッタ法を用いたLi4Ti5O12薄膜の作製とその評価口頭発表(一般)
- 第6回マイクロ・ナノ工学シンポジウム, 2014年10月, 日本語, 国内会議正・逆圧電効果による PZT 薄膜の圧電定数 e31,f の評価口頭発表(一般)
- 第6回マイクロ・ナノ工学シンポジウム, 2014年10月, 日本語, 国内会議金属基板上圧電薄膜アクチュエータを用いたミリメータスケールロボットの作製口頭発表(一般)
- 第6回マイクロ・ナノ工学シンポジウム, 2014年10月, 日本語, 国内会議金属基板上 PZT 薄膜を用いた振動発電素子の信頼性評価に関する研究口頭発表(一般)
- 第6回マイクロ・ナノ工学シンポジウム, 2014年10月, 日本語, 国内会議金属基板上 PZT 薄膜を用いた自励振動発電素子の評価口頭発表(一般)
- 第6回マイクロ・ナノ工学シンポジウム, 2014年10月, 日本語, 国内会議ウエットエッチングによる圧電薄膜の PDMS 基板上への転写技術口頭発表(一般)
- 第6回マイクロ・ナノ工学シンポジウム, 2014年10月, 日本語, 国内会議PZT 圧電薄膜および圧電 MEMS デバイスの信頼性評価口頭発表(一般)
- 2014年秋季第76回応用物理学会学術講演会, 2014年09月, 日本語, 応用物理学会, 札幌市, 国内会議有機圧電エナジーハーベスターにおける振動発電特性の分子配向依存性口頭発表(一般)
- 2014年秋季第77回応用物理学会学術講演会, 2014年09月, 日本語, 応用物理学会, 札幌市, 国内会議ポリ尿素薄膜を用いた焦電・圧電特性および振動発電評価口頭発表(一般)
- 2014年 第75回応用物理学会秋季学術講演会, 2014年09月, 日本語, 国内会議コンビナトリアルスパッタ法による BZT-BCT 圧電薄膜の組成依存性評価口頭発表(一般)
- International ERATO Higashiyama Live-Holonics Symposium 2014 "Plant Live-Cell Imaging and Microdevices", 2014年09月, 英語, 国際会議High-throughput Chemotaxis Assay of Plant-parasitic Nematode by Using a Microchannel Deviceポスター発表
- 第60回高分子研究発表会(神戸), 2014年07月, 日本語, 神戸市, 国内会議延伸処理した強誘電ポリマーの振動発電特性評価口頭発表(一般)
- 応用物理学会関西支部平成26年第1回講演会, 2014年06月, 日本語, 京都市, 国内会議有機圧電型エナジーハーベスターの特性評価ポスター発表
- 化学とマイクロ・ナノシステム学会 第29回研究会, 2014年05月, 日本語, 日本女子大学 目白キャンパス, 国内会議植物寄生性センチュウのハイスループット化学走性分析用デバイスポスター発表
- 第31回強誘電体応用会議, 2014年05月, 日本語, 国内会議コンビナトリアルスパッタ法による PMN-PT 圧電薄膜の組成依存性評価口頭発表(一般)
- 第61回応用物理学会春季学術講演会, 2014年03月, 日本語, 国内会議着脱式マイクロ流路チップを用いたゾル-ゲル法によるPZT薄膜の直接パターニング技術口頭発表(一般)
- 第61回応用物理学会春季学術講演会, 2014年03月, 日本語, 国内会議スパッタ法を用いた Li4Ti5O12薄膜の作製とその評価口頭発表(一般)
- 第61回応用物理学会春季学術講演会, 2014年03月, 日本語, 国内会議コンビナトリアル成膜によるPLZT薄膜の組成依存性評価口頭発表(一般)
- 第5回 マイクロ・ナノ工学シンポジウム, 2013年11月, 日本語, 日本機械学会マイクロ・ナノ工学部門, 仙台国際センター(仙台市), 国内会議植物寄生性センチュウの行動分析用マイクロ流路デバイス:流路規格および流路内物質濃度分布の検証口頭発表(一般)
- 第5回 マイクロ・ナノ工学シンポジウム, 2013年11月, 日本語, 仙台国際センター(仙台市), 国内会議スパッタ法で作製したPZT薄膜積層アクチュエータ口頭発表(一般)
- 日本機械学会 2013 年度年次大会, 2013年09月, 日本語, 岡山大学津島キャンパス(岡山市), 国内会議ステンレス基板上圧電薄膜を用いた MEMS エナジ ーハーベスター口頭発表(一般)
- 日本機械学会 2013 年度年次大会, 2013年09月, 日本語, 岡山大学津島キャンパス(岡山市), 国内会議コンビナトリアル成膜法による PMN-PT薄膜の組成依存性評価口頭発表(一般)
- IEEE 2013 Joint UFFC, EFTF, and PFM Symposium, 2013年07月, 英語, IEEE, プラハ, 国際会議Piezoelectric thin films公開講演,セミナー,チュートリアル,講習,講義等
- IEEE 2013 Joint UFFC, EFTF, and PFM Symposium, 2013年07月, 英語, IEEE, プラハ, 国際会議Composition depndence of PMN-PT thin films prepared by combinatorial sputteringポスター発表
- 第30回強誘電体応用会議, 2013年05月, 日本語, 京都市, 国内会議ステンレス基板上非鉛KNN薄膜を用いたMEMSエナジーハーベスター口頭発表(一般)
- 3rdInternational PiezoMEMS Workshop, 2013年04月, 英語, ワシントンDC, 国際会議Piezoelectric MEMS of lead-free KNN thin films[招待有り]口頭発表(招待・特別)
- IIP2013情報・知能・精密機器部門講演会, 2013年03月, 日本語, 日本機械学会, 東京, 国内会議非鉛圧電薄膜(K,Na)NbO3の微細加工技術口頭発表(一般)
- IIP2013情報・知能・精密機器部門講演会, 2013年03月, 日本語, 日本機械学会, 東京, 国内会議金属基板上PZT薄膜を利用したジャイロセンサーの開発に関する研究口頭発表(一般)
- 応用物理学会春季学術講演, 2013年03月, 日本語, 応用物理学会, 東京, 国内会議シリコン基板上に作製したPZT薄膜積層アクチュエータ口頭発表(一般)
- 応用物理学会春季学術講演, 2013年03月, 日本語, 応用物理学会, 東京, 国内会議コンビナトリアル成膜によるBZT-BCT薄膜の組成依存性評価口頭発表(一般)
- IIP2013情報・知能・精密機器部門講演会, 2013年03月, 日本語, 日本機械学会, 東京, 国内会議エピタキシャルPZT薄膜を用いた高効率圧電型振動発電素子に関する研究口頭発表(一般)
- he 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2012), 2012年12月, 英語, Atranta, USA, 国際会議PIEZOELECTRIC MEMS ENERGY HARVESTERS OF PZT THIN FILMS ON STAINLESS STEEL CANTILEVERSポスター発表
- 第53回真空に関する連合講演会, 2012年11月, 日本語, 日本真空学会, 甲南大学ポートアイランドキャンパス, 国内会議シリコン基板上に作製したPZT薄膜積層アクチュエータ口頭発表(一般)
- 第53回真空に関する連合講演会, 2012年11月, 日本語, 日本真空学会, 甲南大学ポートアイランドキャンパス, 国内会議コンビナトリアル成膜法によるBZT-BCT非鉛圧電薄膜の作製と圧電特性評価口頭発表(一般)
- International Conference on Emerging Trends in Engineering & Technology (ICETET-12), 2012年11月, 英語, IEEE, 姫路, 国際会議Fabrication and characterization of lead-free piezoelectric thin films口頭発表(一般)
- 第4回マイクロ・ナノ工学シンポジウム, 2012年10月, 日本語, 日本機械学会, 北九州, 国内会議金属基板を用いたPZT圧電薄膜エナジーハーベスト口頭発表(一般)
- 第4回マイクロ・ナノ工学シンポジウム, 2012年10月, 日本語, 日本機械学会, 北九州, 国内会議RFマグネトロンスパッタ法によるPMN-PT薄膜の圧電特性口頭発表(一般)
- 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), 2012年10月, 英語, IEEE, Hawaii, USA, 国際会議MEMS Energy Harvesters of Piezoelectric Thin Films[招待有り]口頭発表(招待・特別)
- 第4回マイクロ・ナノ工学シンポジウム, 2012年10月, 英語, 日本機械学会, 北九州, 国内会議Fabrication and characterization of lead-free piezoelectri thin filmsポスター発表
- 2012年秋季 第73回応用物理学会学術講演会, 2012年09月, 日本語, 応用物理学会, 愛媛大学・松山大学, 国内会議非鉛圧電薄膜(K,Na)NbO3を用いたMEMSデバイス作製及び評価口頭発表(一般)
- 日本学術振興会第161委員会第78回研究会 「エネルギーハーベスト」, 2012年09月, 日本語, 日本学術振興会, 名古屋大学, 国内会議PZT圧電薄膜を用いた振動発電素子[招待有り]シンポジウム・ワークショップパネル(指名)
- CMOS Emerging Technologies 2012, 2012年07月, 英語, Vancouver, Canada, 国際会議Piezoelectric Energy Harvesters of Lead-Free (K, Na)NbO3 Thin Films口頭発表(一般)
- 6th Asia-Pacific Conference on Transducers and Micro, 2012年07月, 英語, Nanjin, Chaina, 国際会議Microfabrication of Lead-Free (Ka,Na)NbO3 Piezoelectric Thin Films by Dry Etching[招待有り]口頭発表(一般)
- 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, 2012年07月, 英語, Nanjin, Chaina, 国際会議Microfabrication of Lead-Free (Ka,Na)NbO3 Piezoelectric Thin Films by Dry Etching口頭発表(一般)
- International Symposium on Integrated Functionalities 2012 (ISIF2012), 2012年06月, 英語, Hong Kong, 国際会議Compositional Dependence of Piezoelectric PZT Films by Combinatorial Sputtering口頭発表(一般)
- 第29回強誘電体応用会議(FMA29), 2012年05月, 日本語, 京都市, 国内会議圧電薄膜とMEMS応用[招待有り]口頭発表(招待・特別)
- 第29回強誘電体応用会議(FMA29), 2012年05月, 日本語, 京都市, 国内会議コンビナトリアル成膜によるPZT圧電薄膜の組成依存性評価口頭発表(一般)
- 20th IEEE International Symposium on Applications of Ferroelectrics (ISAF) and International Symposium on Piezoresponse Force Microscopy on Nanoscale Phenomena in Polar Materials (PFM), ISAF-PFM-2011, 2011年07月, 英語, IEEE, Vancouver, Canada, 国際会議Multilayer Thin‐Film Capacitors Fabricated by Radio-Frequency Magnetron Sputteringポスター発表
■ Works_作品等- 2002年産業技術研究助成事業 「超格子圧電薄膜材料の開発とマイクロマシンデバイスへの応用」
- 2002年Industrial Technology Research Grant Program "Development of piezoelectric films with super structures and their application for MEMS"
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